掌桥科研
一站式科研服务平台
科技查新
收录引用
专题文献检索
外文数据库(机构版)
更多产品
首页
成为会员
我要充值
退出
我的积分:
中文会员
开通
中文文献批量获取
外文会员
开通
外文文献批量获取
我的订单
会员中心
我的包量
我的余额
登录/注册
文献导航
中文期刊
>
中文会议
>
中文学位
>
中国专利
>
外文期刊
>
外文会议
>
外文学位
>
外国专利
>
外文OA文献
>
外文科技报告
>
中文图书
>
外文图书
>
工业技术
基础科学
医药卫生
农业科学
教科文艺
经济财政
社会科学
哲学政法
其他
工业技术
基础科学
医药卫生
农业科学
教科文艺
经济财政
社会科学
哲学政法
其他
自然科学总论
数学、物理、化学、力学
天文学、地球科学
生物科技
医学、药学、卫生
航空航天、军事
农林牧渔
机械、仪表工业
化工、能源
冶金矿业
电子学、通信
计算机、自动化
土木、建筑、水利
交通运输
轻工业技术
材料科学
电工技术
一般工业技术
环境科学、安全科学
图书馆学、情报学
社会科学
其他
马克思主义、列宁主义、毛泽东思想、邓小平理论
哲学、宗教
社会科学总论
政治、法律
军事
经济
文化、科学、教育、体育
语言、文字
文学
艺术
历史、地理
自然科学总论
数理科学和化学
天文学、地球科学
生物科学
医药、卫生
农业科学
工业技术
交通运输
航空、航天
环境科学、安全科学
综合性图书
自然科学总论
数学、物理、化学、力学
天文学、地球科学
生物科技
医学、药学、卫生
航空航天、军事
农林牧渔
机械、仪表工业
化工、能源
冶金矿业
电子学、通信
计算机、自动化
土木、建筑、水利
交通运输
轻工业技术
材料科学
电工技术
一般工业技术
环境科学、安全科学
图书馆学、情报学
社会科学
其他
自然科学总论
数学、物理、化学、力学
天文学、地球科学
生物科技
医学、药学、卫生
航空航天、军事
农林牧渔
机械、仪表工业
化工、能源
冶金矿业
电子学、通信
计算机、自动化
土木、建筑、水利
交通运输
轻工业技术
电工技术
一般工业技术
环境科学、安全科学
图书馆学、情报学
社会科学
其他
自然科学总论
数学、物理、化学、力学
天文学、地球科学
生物科技
医学、药学、卫生
航空航天、军事
农林牧渔
机械、仪表工业
化工、能源
冶金矿业
电子学、通信
计算机、自动化
土木、建筑、水利
交通运输
轻工业技术
材料科学
电工技术
一般工业技术
环境科学、安全科学
图书馆学、情报学
社会科学
其他
美国国防部AD报告
美国能源部DE报告
美国航空航天局NASA报告
美国商务部PB报告
外军国防科技报告
美国国防部
美国参联会主席指示
美国海军
美国空军
美国陆军
美国海军陆战队
美国国防技术信息中心(DTIC)
美军标
美国航空航天局(NASA)
战略与国际研究中心
美国国土安全数字图书馆
美国科学研究出版社
兰德公司
美国政府问责局
香港科技大学图书馆
美国海军研究生院图书馆
OALIB数据库
在线学术档案数据库
数字空间系统
剑桥大学机构知识库
欧洲核子研究中心机构库
美国密西根大学论文库
美国政府出版局(GPO)
加利福尼亚大学数字图书馆
美国国家学术出版社
美国国防大学出版社
美国能源部文献库
美国国防高级研究计划局
美国陆军协会
美国陆军研究实验室
英国空军
美国国家科学基金会
美国战略与国际研究中心-导弹威胁网
美国科学与国际安全研究所
法国国际关系战略研究院
法国国际关系研究所
国际宇航联合会
美国防务日报
国会研究处
美国海运司令部
北约
盟军快速反应部队
北约浅水行动卓越中心
北约盟军地面部队司令部
北约通信信息局
北约稳定政策卓越中心
美国国会研究服务处
美国国防预算办公室
美国陆军技术手册
一般OA
科技期刊论文
科技会议论文
图书
科技报告
科技专著
标准
其它
美国卫生研究院文献
分子生物学
神经科学
药学
外科
临床神经病学
肿瘤学
细胞生物学
遗传学
公共卫生&环境&职业病
应用微生物学
全科医学
免疫学
动物学
精神病学
兽医学
心血管
放射&核医学&医学影像学
儿科
医学进展
微生物学
护理学
生物学
牙科&口腔外科
毒理学
生理学
医院管理
妇产科学
病理学
生化技术
胃肠&肝脏病学
运动科学
心理学
营养学
血液学
泌尿科学&肾病学
生物医学工程
感染病
生物物理学
矫形
外周血管病
药物化学
皮肤病学
康复学
眼科学
行为科学
呼吸学
进化生物学
老年医学
耳鼻喉科学
发育生物学
寄生虫学
病毒学
医学实验室检查技术
生殖生物学
风湿病学
麻醉学
危重病护理
生物材料
移植
医学情报
其他学科
人类生活必需品
作业;运输
化学;冶金
纺织;造纸
固定建筑物
机械工程;照明;加热;武器;爆破
物理
电学
人类生活必需品
作业;运输
化学;冶金
纺织;造纸
固定建筑物
机械工程;照明;加热;武器;爆破
物理
电学
马克思主义、列宁主义、毛泽东思想、邓小平理论
哲学、宗教
社会科学总论
政治、法律
军事
经济
文化、科学、教育、体育
语言、文字
文学
艺术
历史、地理
自然科学总论
数理科学和化学
天文学、地球科学
生物科学
医药、卫生
农业科学
工业技术
交通运输
航空、航天
环境科学、安全科学
综合性图书
主题
主题
题名
作者
关键词
摘要
高级搜索 >
外文期刊
外文会议
外文学位
外国专利
外文图书
外文OA文献
中文期刊
中文会议
中文学位
中国专利
中文图书
外文科技报告
清除
历史搜索
清空历史
首页
>
外文会议
>
一般工业技术
>
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009
召开年:
召开地:
出版时间:
-
会议文集:
-
会议论文
热门论文
全部论文
相关中文期刊
真空
衡器
大众标准化
中国质量与品牌
中国图象图形学报
新技术新工艺
襄樊高新区
真空与低温
新材料产业
爆破
更多>>
相关外文期刊
International Journal of Plant Engineering and Management
Materials Research Bulletin
Technische Uberwachung
International journal of design engineering
Forschung im Ingenieurwesen
Progress in Materials Science
Cartonnages Emballages Modernes
Materialwissenschaft und Werkstofftechnik
Proceedings of the IEE - Part IV: Institution Monographs
The journal of hazmat transportation
更多>>
相关中文会议
第二届长三角科技论坛——长三角包装发展论坛
第四届中国冷冻冷藏新技术新设备研讨会
北京力学会第13届学术年会
北京力学会第16届学术年会
'2002计量测试学术研讨会
第十四届全国质谱分析和检漏会议、第九届全国真空计量测试会
中国工程热物理学会工程热力学与能源利用学术会议
第八届全国声发射学术研讨会
2012年全国声学设计与噪声振动控制工程技术交流会
江苏省颗粒学会2014年学术年会暨江苏省化工环保技术2014研讨会
更多>>
相关外文会议
International Conference on Proceeding & Manufacturing of Advanced Materials; 20060704-08; Vancouver(CA)
Global Plastics Environmental Conference(GPEC 2007); 20070304-07; Orlando,FL(US)
Asia Pacific Conference on Optics Manufacture; 20070111-13; Hongkong(CN)
NACE International CORROSION/2006 Conference Papers
PLACE flexible packaging summit 2013: new technologies
ACS Symposium Series 891; American Chemical Society(ACS) Symposium on Defense Applications of Nanomaterials; ;
ASME international design engineering technical conferences and computers and information in engineering conference 2008
TP05-01 - TP05-20, TP05-23; Cooling Technology Institute Annual Conference; 20050228-0303; San Antonio,TX(US)
Engineering Structures under Extreme Conditions: Multi-Physics and Multi-Scale Computer Models in Non-Linear Analysis and Optimal Design; NATO Science Series III: Computer and Systems Sciences; vol.194
Conference on Machine Vision Applications in Industrial Inspection XII; 20040121-20040122; San Jose,CA; US
更多>>
热门会议
Meeting of the internet engineering task force;IETF
日本建築学会;日本建築学会大会
日本建築学会(Architectural Institute of Japan);日本建築学会年度大会
日本建築学会学術講演会;日本建築学会
日本建築学会2010年度大会(北陸)
Korean Society of Noise & Vibration Control;Institute of Noise Control Engineering;International congress and exposition on noise control engineering;ASME Noise Control & Acoustics Division
土木学会;土木学会全国大会年次学術講演会
応用物理学会秋季学術講演会;応用物理学会
総合大会;電子情報通信学会
The 4th International Conference on Wireless Communications, Networking and Mobile Computing(第四届IEEE无线通信、网络技术及移动计算国际会议)论文集
更多>>
最新会议
2011 IEEE Cool Chips XIV
International workshop on Java technologies for real-time and embedded systems
Supercomputing '88. [Vol.1]. Proceedings.
RILEM Proceedings PRO 40; International RILEM Conference on the Use of Recycled Materials in Buildings and Structures vol.1; 20041108-11; Barcelona(ES)
International Workshop on Hybrid Metaheuristics(HM 2007); 20071008-09; Dortmund(DE)
The 57th ARFTG(Automatic RF Techniques Group) Conference, May 25, 2001, Phoenix, AZ
Real Time Systems Symposium, 1989., Proceedings.
Conference on Chemical and Biological Sensing V; 20040412-20040413; Orlando,FL; US
American Filtration and Separations Society conference
Combined structures congress;North American steel construction conference;NASCC
更多>>
全选(
0
)
清除
导出
1.
Design and parametric study of a tubular passive micro direct methanol fuel cell
机译:
管状无源微型直接甲醇燃料电池的设计和参数研究
作者:
Xiuling Ji
;
Yunjian Liu
;
Wenzhong Lou
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
direct methanol fuel cells;
micromechanical devices;
circumrotating condition;
direct methanol fuel cell;
parallel flow fields;
serpentine;
tubular passive microDMFC;
design;
parametric study;
tubular passive µDMFC;
2.
Single-neuron spinning control system for a non-silicon micromachined rotational gyro
机译:
非硅微机械旋转陀螺仪的单神经元旋转控制系统
作者:
Gaoyin Ma
;
Wenyuan Chen
;
Qijun Xiao
;
Weiping Zhang
;
Feng Cui
;
Kai Li
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
electrostatic devices;
gyroscopes;
micromachining;
micromechanical devices;
nickel;
rotation;
rotors;
MEMS gyro;
Ni;
PSpice driving circuit models;
Simulink models;
electrostatic levitation;
nonlinear spinning;
rotational gyro;
single-neuron spinning control system;
Gyro;
MEMS;
single neuron;
spinning control;
3.
A micro amperometric immunosensor immobilized with electropolymerized staphylococcal protein a for the detection of salmonella typhimurium
机译:
固定有电聚合葡萄球菌蛋白a的微安培免疫传感器,用于检测鼠伤寒沙门氏菌
作者:
Sun Jizhou
;
Bian Chao
;
Qu Lan
;
Xia Shanhong
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
amperometric sensors;
biosensors;
microsensors;
proteins;
voltammetry (chemical analysis);
Salmonella typhimurium;
cyclic voltammetry;
electropolymerized Staphylococcal protein A;
micro amperometric immunosensor;
micro biosensor;
microelectro-mechanical systems technology;
salmonella capture antibodies;
Amperometric immunosensor;
MEMS;
staphylococcal protein A;
4.
Investigations on electrohydrodynamical drop-on-demand inkjet printing
机译:
电动流体动力学按需喷墨印刷的研究
作者:
Yinhong Dai
;
Donghang Chen
;
Lingyun Wang
;
Daoheng Sun
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
drops;
electrohydrodynamics;
ink jet printers;
droplet;
electrohydrodynamical drop-on-demand inkjet printing;
liquid shaping;
microjetting ejection;
size 50 mum;
design variables;
droplets size;
electrostatic inkjet printing;
5.
Study on self-alignment property of silicon nanowire in temperature gradient
机译:
硅纳米线在温度梯度下的自对准特性研究
作者:
Yanfeng Jiang
;
Xiaobo Zhang
;
Bing Yang
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
elemental semiconductors;
nanofabrication;
nanowires;
semiconductor growth;
silicon;
Si;
electric field;
self-alignment characteristics;
silicon nanowire;
temperature gradient field;
vapor-liquid-solid method;
Self-alignment;
Temperature Gradient;
6.
An investigation of buckypapers' Young's modulus utilizing nanoscale modeling and Molecular Dynamics simulation
机译:
利用纳米模型和分子动力学模拟研究巴基纸的杨氏模量
作者:
Yunguang Ji
;
Yueh-Jaw Lin
;
Buldum A.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
Young's modulus;
carbon nanotubes;
molecular dynamics method;
C;
carbon nanotube thin films;
molecular dynamic simulation;
molecular mechanics;
multiwalled carbon nanotubes;
nanoscale mechanics;
single layer buckypapers;
single walled carbon nanotubes;
7.
Trilayer nanoimprint fabrication and simulation of the silicon nanowire sensor for gas detection
机译:
用于气体检测的硅纳米线传感器的三层纳米压印制造和仿真
作者:
Jing Wan
;
Shao-Ren Deng
;
Yifang Chen
;
Huq E.
;
Ran Liu
;
Xin-Ping Qu
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
gas sensors;
nanolithography;
nanosensors;
silicon-on-insulator;
dopant concentration;
gas detection;
silicon nanowire sensor;
silicon on insulator;
trilayer nanoimprint fabrication;
SU8;
nanoimprint;
8.
Engineering atom chips
机译:
工程原子芯片
作者:
Kraft Michael
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
9.
An electrothermal micromixer for molecular analysis
机译:
用于分子分析的电热微混合器
作者:
Sin M.
;
Gidwani V.
;
Gau V.
;
Pak Kin Wong
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
DNA;
bioMEMS;
biochemistry;
microfluidics;
mixers (circuits);
molecular biophysics;
60-fold reduction;
DNA hybridization;
concentric electrode design;
diffusion;
electrothermal flow;
electrothermal micromixer;
frequency 200 kHz to 400 kHz;
microfluidic cartridge;
microfluidic-based biochemical analysis systems;
molecular analysis;
biosensor;
fluidic manipulation;
lab-on-a-chip;
micromixer;
10.
Interfacing micro-ano-scale biological and abiological materials for bio/abio hybrid systems
机译:
用于生物/非生物杂合系统的微/纳米级生物和生物材料的接口
作者:
Tung Steve C. H.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
11.
CNT-based extreme low-power micro motion sensors
机译:
基于CNT的超低功耗微动传感器
作者:
Li Wen J.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
12.
Theoretical characterization on nano freeze tweezer enabled from convective cooling principle
机译:
基于对流冷却原理的纳米冷冻镊子的理论表征
作者:
Yang Yang
;
Jing Liu
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
convection;
freezing;
radiation pressure;
convective cooling;
micro freezing tweezer;
nano freeze tweezer;
ventilating low temperature gas;
Freeze tweezer;
Nano device;
Theoretical analysis;
13.
Effect of effective viscosity on characteristics of microscale gas journal bearings
机译:
有效粘度对微型气轴颈轴承性能的影响
作者:
Haijun Zhang
;
Changsheng Zhu
;
Qin Yang
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
finite difference methods;
machine bearings;
slip flow;
viscosity;
attitude angle;
eccentricity;
finite difference method;
load capacity;
microscale gas journal bearings;
modified Reynolds equation;
nondimensional pressure distribution;
rarefied condition;
reference Knudsen number;
slip velocity boundary;
effective viscosity;
14.
Etch-back in DDSOG process by ultrasonic agitation and application to tunneling gyroscope fabrication
机译:
DDSOG超声搅拌回蚀技术及其在隧道陀螺仪制造中的应用
作者:
Lingyun Wang
;
Yibo Zeng
;
Wenwang Li
;
Daoheng Sun
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
bonds (chemical);
etching;
gyroscopes;
silicon-on-insulator;
surface finishing;
surface roughness;
ultrasonic effects;
Si;
anodic bonded silicon-on-glass wafer;
bonding intensity;
deeply dissolved silicon-on-glass process;
etch-back;
power 120 W;
root-mean-square roughness;
silicon film;
size 30 mum;
size 360 mum;
tunneling gyroscope;
ultrasonic agitation;
ultrasonic power;
DDSOG process;
KOH etching;
etch back;
15.
Simulation of levitation control for a micromachined electrostatically levitated gyroscope
机译:
微机械静电悬浮陀螺仪的悬浮控制仿真
作者:
Qijun Xiao
;
Wenyuan Chen
;
Gaoyin Ma
;
Feng Cui
;
Shengyong Li
;
Weiping Zhang
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
LIGA;
finite element analysis;
gyroscopes;
magnetic levitation;
micromechanical devices;
three-term control;
ultraviolet lithography;
UV-LIGA fabrication;
axial squeeze film damping coefficient;
feedback linearization control;
levitation control;
micromachined electrostatically levitated gyroscope;
proportional integral differential control;
control;
electrostatically;
levitation;
micro-gyroscope;
16.
Design and analysis of novel solid biaxial micro-gyroscope with special mode excitation
机译:
新型带特殊模式激发的固体双轴微陀螺仪的设计与分析
作者:
Yipeng Lu
;
Weiping Zhang
;
Xiaosheng Wu
;
Wenyuan Chen
;
Feng Cui
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
Coriolis force;
electric sensing devices;
finite element analysis;
gyroscopes;
piezoelectric devices;
vibrational modes;
FEM;
biaxial applied angular velocity;
coupling displacement;
detection control system;
maximum sense displacement;
microdevice;
mode detection voltage;
piezoelectric bulk vibration;
resonance mode;
solid biaxial microgyroscope;
micro-gyroscope;
pezoelectricity;
solid;
special mode;
vibrating gyroscope;
17.
Boron doped hydrogenated nanocrystalline silicon thin films prepared by layer-by-layer technique and its application in n-i-p flexible amorphous silicon thin film solar cells
机译:
逐层制备硼掺杂氢化纳米晶硅薄膜及其在n-i-p柔性非晶硅薄膜太阳能电池中的应用
作者:
Ke Tao
;
Dexian Zhang
;
Yun Sun
;
Linshen Wang
;
Jingfang Zhao
;
Ying Xue
;
Yuanjian Jiang
;
Hongkun Cai
;
Yanping Sui
;
Jin Wang
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
boron;
crystallisation;
electrical conductivity;
elemental semiconductors;
grain size;
hydrogen;
nanostructured materials;
plasma CVD;
semiconductor thin films;
silicon;
solar cells;
thin film devices;
RF power density;
boron doped hydrogenated nanocrystalline silicon thin films;
buffer layer;
conductivity;
gas pressure;
layer-by-layer technique;
n-i-p flexible amorphous silicon thin film solar cells;
power density;
radio frequency plasma enhance chemical vapor deposition system;
Boron doped;
Flexible thin film solar;
18.
DNA ligation using coplanar electrodes electro-wetting-ondielectric (EWOD) device
机译:
使用共面电极电润湿电介质(EWOD)设备进行DNA连接
作者:
Hung-Chia Lin
;
Yi-Ju Liu
;
Da-Jeng Yao
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
DNA;
bioMEMS;
biomedical electrodes;
enzymes;
lab-on-a-chip;
microfluidics;
molecular biophysics;
DNA ligation;
EWOD device;
biomolecular ligation;
coplanar electrodes;
digital microfluidics system;
electrowetting-on-dielectric device;
enzyme;
micrototal analysis system;
salt solution;
Coplanaer electrodes;
EWOD;
19.
Development of vacuum packaged CMOS thermoelectric energy harvester
机译:
真空包装CMOS热电能量收集器的开发
作者:
Chengkuo Lee
;
Jin Xie
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
CMOS integrated circuits;
energy harvesting;
finite element analysis;
micromechanical devices;
solders;
thermocouples;
thermoelectric conversion;
thermoelectric devices;
wafer bonding;
MEMS based thermoelectric power generator;
finite element method;
solder based wafer bonding technology;
thermocouple junction;
vacuum packaged CMOS energy harvester;
Energy harvester;
MEMS;
Power generator;
Thermoelectric;
20.
Nanomechanical cantilever sensor using optical nanocavity resonator
机译:
使用光学纳米腔谐振器的纳米机械悬臂传感器
作者:
Chengkuo Lee
;
Wenfeng Xiang
;
Thillaigovindan J.
;
Fu-Li Hsiao
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
cantilevers;
cavity resonators;
elemental semiconductors;
nanophotonics;
nanosensors;
optical resonators;
silicon;
strain measurement;
strain sensors;
Si;
U-shaped silicon waveguide;
air hole;
biomolecular detection;
detectable strain;
nanomechanical cantilever sensor modeling;
optical nanocavity resonator;
resonant wavelength shift;
resonant wavelength shift linear function;
size 50 mum;
NEMS;
Nanomechanical;
Sensors;
21.
Polymer BioMEMS for implantable drug delivery systems
机译:
用于植入式药物输送系统的Polymer BioMEMS
作者:
Meng Ellis
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
22.
Synthesis of gold nanoparticles using a vortex-type micro-mixing system
机译:
使用涡旋式微混合系统合成金纳米颗粒
作者:
Sung-Yi Yang
;
Fong-Yu Cheng
;
Chen-Sheng Yeh
;
Huan-Yao Lei
;
Gwo-Bin Lee
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
casting;
computerised numerical control;
gold;
microfluidics;
micropumps;
mixing;
nanoparticles;
nanotechnology;
particle size;
Au;
CNC machining;
PDMS casting;
gold nanoparticles;
microfluidic reaction chip;
micropump;
time 5 min;
vortex-type flow field;
vortex-type micromixing system;
MEMS;
Micro-pump;
Micromixer;
23.
Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors
机译:
用于创新型NEMS传感器的纳米结构中高机械应力的有限元研究
作者:
Xin Xu
;
Bercu B.
;
Lime F.
;
Montes L.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
deformation;
finite element analysis;
micromechanical devices;
nanosensors;
piezoresistive devices;
pressure measurement;
pressure sensors;
MOS transistors;
carrier mobility;
finite elements;
four-point-bending method;
innovative NEMS sensors;
mechanical stress;
microelectronics;
nanostructures;
piezoresistive effects;
strained silicon;
tunnel current;
Finite element method;
NEMS;
mechanical stress/strain;
nanowire;
pressure sensor;
tunnel junction;
ultra-thin membrane;
24.
Design of a MEMS sensor to detect the Casimir force
机译:
用于检测卡西米尔力的MEMS传感器的设计
作者:
Yamarthy C.
;
McNamara S.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
Casimir effect;
capacitive sensors;
measurement systems;
microfabrication;
microsensors;
thermal noise;
Casimir force boundaries;
Casimir force detection;
MEMS sensor design;
capacitance shift;
capacitive sensing;
measurement system;
parallel plate geometry;
Casimir force;
MEMS;
microfabricated;
25.
A backstepping controller for piezoelectric actuators with hysteresis in nanopositioning
机译:
纳米定位中具有磁滞的压电执行器的反推控制器
作者:
Payam A.F.
;
Fathipour M.
;
Yazdanpanah M.J.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
control system synthesis;
hysteresis;
nanopositioning;
piezoelectric actuators;
Bouc-Wen model;
backstepping controller design;
error tracking reduction;
nanopositioning control factor scheme;
nonlinear hysteretic effect;
piezoelectric actuator;
traditional closed loop PID controller;
Backstepping control;
hysteretic effect;
26.
Design of a feedforward controller for AFM nanopositioning based on neural network control theory
机译:
基于神经网络控制理论的AFM纳米定位前馈控制器设计
作者:
Payam A.F.
;
Yazdanpanah M.J.
;
Fathipour M.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
atomic force microscopy;
controllers;
nanopositioning;
neural nets;
AFM nanopositioning;
atomic force microscope system;
computer simulation;
feedforward controller;
neural network control theory;
plant inverse learning;
AFM control;
Atomic Force Microscope;
Piezoelectric Actuator;
27.
Evalution of bulk titanium DRIE Using SU-8 as soft mask
机译:
使用SU-8作为软掩膜的块状钛DRIVE评估
作者:
Gang Zhao
;
Yao Tian
;
Qiong Shu
;
Jing Chen
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
masks;
optimisation;
plasma materials processing;
plasma sources;
sputter etching;
titanium;
ICP source power;
SU-8 softmask;
Ti;
bulk titanium DRIE;
cost efficiency;
deep reactive ion etching;
etch profile;
inductively coupled chlorine plasma;
optimized process parameters;
power 100 W;
power 400 W;
ultra deep etching;
DRIE;
SU-8;
profile;
softmask;
28.
A new 2D structure for chemotaxis measurement of adhesive cells
机译:
用于粘附细胞趋化性测量的新型2D结构
作者:
Kwak Y.H.
;
Park S.S.
;
Hong S.M.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
bioMEMS;
biomedical measurement;
cancer;
cellular biophysics;
2D structure;
Boyden chamber;
PDMS chip;
adhesive cells;
cancer metastasis;
cell kinetics;
chemotactic material;
chemotaxis measurement;
Chemotaxis;
Concentration gradient;
29.
Fabrication of compact collateral silicon nanowires based on continuously alternating deposition
机译:
基于连续交替沉积的紧凑型并行硅纳米线的制备
作者:
Wu D.
;
Mao H.Y.
;
Wu W.G.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
elemental semiconductors;
etching;
nanofabrication;
nanopatterning;
nanowires;
photolithography;
silicon;
biosensors;
collateral nanowires;
etching properties;
lithographically defined sidewalls;
model catalyst system;
nanopattern masks;
polysilicon;
sacrificial material;
silicon oxide;
single crystalline silicon;
Low Pressure CVD;
nanowire;
spacer technology;
30.
CMOs interface circuitry for a closed-loop capacitive MEMS accelerometer
机译:
闭环电容MEMS加速度计的CMO接口电路
作者:
Yuntao Liu
;
Xiaowei Liu
;
Liang Yin
;
Weiping Chen
;
Qun Wu
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
1/f noise;
CMOS integrated circuits;
accelerometers;
circuit stability;
micromechanical devices;
operational amplifiers;
signal sampling;
switched capacitor networks;
three-term control;
CMOS interface circuit;
closed-loop capacitive MEMS accelerometer;
correlated double sampling technique;
frequency response performance;
minimum acceleration detection;
operation amplifier;
proportional-integral-differential adjuster;
size 0.5 mum;
switched-capacitor charge integration method;
system stability;
Accelerometer;
CMOS;
31.
Design of a multi-walled carbon nanotubes vacuum gauge
机译:
多壁碳纳米管真空计的设计
作者:
Ki-Young Dong
;
Youngmin
;
Seung-IL Moon
;
Jinwoo Lee
;
Jinnil Choi
;
Byeong-Kwon Ju
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
carbon nanotubes;
electric sensing devices;
electron field emission;
nanotube devices;
vacuum gauges;
MWCNT sensor;
electric field;
electron emission;
field emission device;
multiwalled carbon nanotube vacuum gauge;
screen printer;
vacuum device;
field emission;
multi-walled carbon nanotues;
sensor;
vacuum gauge;
32.
Preparation of kerosene based nano-magnetic fluid and its application in pressure difference sensors
机译:
煤油基纳米磁流体的制备及其在压差传感器中的应用
作者:
Hao Ruican
;
Li Decai
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
iron compounds;
magnetic fluids;
materials preparation;
nanostructured materials;
nanotechnology;
paramagnetic materials;
pressure sensors;
kerosene based nanomagnetic fluid;
paramagnetism;
pressure difference sensors;
magnetic fluid;
preparation;
pressure difference;
sensor;
33.
The analysis and structural design of micro SOI pressure sensors
机译:
微型SOI压力传感器的分析与结构设计
作者:
Bian Tian
;
Yulong Zhao
;
Zhuangde Jiang
;
Ling Zhang
;
Nansheng Liao
;
Yuanhao Liu
;
Chao Meng
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
etching;
finite element analysis;
microsensors;
piezoresistive devices;
pressure sensors;
silicon-on-insulator;
anisotropy chemical etching;
finite element method;
micro SOI pressure sensors;
micro piezoresistive pressure sensor;
silicon on insulator;
stress distribution;
temperature coefficient;
FEM;
High temperature;
Pressure;
SOI;
34.
High sensitivity, low operational temperature ITO nano gas sensor with integrated circuits
机译:
具有集成电路的高灵敏度,低工作温度ITO纳米气体传感器
作者:
Shiyou Xu
;
Yong Shi
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
X-ray diffraction;
crystal structure;
electrospinning;
gas sensors;
hydrogen;
indium compounds;
integrated circuits;
nanofabrication;
nanofibres;
nanosensors;
nitrogen compounds;
scanning electron microscopy;
temperature sensors;
Hsub2/sub;
ITO;
NOsub2/sub;
SEM;
XRD;
electrospinning process;
indium-tin-oxide nanofiber morphology;
interdigitated electrode;
micro temperature sensor;
microheater;
nano gas sensor;
temperature 293 K to 298 K;
temperature 300 C;
35.
Improved adhesion between C-MEMS and substrate by micromechanical interlocking
机译:
通过微机械互锁提高C-MEMS与基板之间的粘合力
作者:
Jie Gong
;
Zirong Tang
;
Tielin Shi
;
Guanglan Liao
;
Lei Nie
;
Shiyuan Liu
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
adhesion;
bonding processes;
carbon;
etching;
microfabrication;
micromechanical devices;
photoresists;
pyrolysis;
SU-8 photoresist development;
Si;
anisotropic wet chemical etching;
aqueous tetramethyl ammonium hydroxide;
aspect ratio;
bonding process;
high-aspect-ratio glassy-carbon MEMS;
micromechanical interlocking;
potassium hydroxide solution;
pyrolysis process;
silicon substrate;
spacing pits;
temperature 80 C;
Carbon MEMS;
36.
Infrared heating and roller-based contact printing technology for the fabrication of microano-structures
机译:
红外加热和基于辊的接触印刷技术,用于制造微/纳米结构
作者:
Yung-Chun Lee
;
Hsueh-Liang Chen
;
Chun-Hung Chen
;
Hung-Yi Lin
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
heat treatment;
infrared sources;
metallic thin films;
microfabrication;
nanofabrication;
nanolithography;
nanopatterning;
quartz;
soft lithography;
substrates;
SiOsub2/sub;
adhesion layer;
etching;
glass roller;
infrared assisted metal transfer technique;
infrared heating;
infrared light source;
metal transfer;
nanoimprinting method;
quartz substrates;
roller-based contact printing technology;
silicon mold;
thin metal film;
contact;
roller imprinting;
37.
Micromachined interferometric accelerometer fabricated using SGADER process
机译:
使用SGADER工艺制造的微机械干涉加速度计
作者:
Kang Wu
;
Xiongying Ye
;
Feng Chen
;
Litao Liu
;
Linrui Guo
;
Zhaoying Zhou
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
accelerometers;
bonding processes;
diffraction gratings;
elemental semiconductors;
etching;
glass;
interferometry;
silicon;
SGADER process;
SiOsub2/sub;
SiOsub2/sub-Si-SiOsub2/sub;
deep etching release;
diffraction grating;
glass-silicon-glass sandwich structure;
micromachined interferometric accelerometer;
protection stoppers;
silicon glass anodic-bonding;
silicon support substrate;
accelerometer;
interferometric;
mems;
sandwich;
38.
Microfluidic mixing with electrokinetic instability in a double T-shaped microchannel
机译:
在双T形微通道中具有电动不稳定的微流体混合
作者:
Shou-Ping Hsu
;
Kao-Feng Yarn
;
Win-Jet Luo
;
I-Ting Hsieh
;
Hong-Jun Ye
;
Meng-Hua Chung
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
electrokinetic effects;
electrolytes;
flow instability;
fluctuations;
microchannel flow;
stratified flow;
DC electrical field;
double T-shaped microchannel;
electrokinetic instability;
electrolyte solutions;
microfluidic mixing;
Electrical conductivity;
Electrical field perturbation;
Electrokinetic instability (EKI);
Mixing efficiency;
39.
Effect of nitrogen flow ratios on microstructure and mechanical properties of nanocomposite Ti-Si-N thin flims
机译:
氮流量比对纳米复合Ti-Si-N薄膜的显微组织和力学性能的影响
作者:
Chung C.K.
;
Jhu J.J.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
X-ray chemical analysis;
X-ray diffraction;
crystal microstructure;
crystal morphology;
hardness;
indentation;
nanocomposites;
scanning electron microscopy;
silicon compounds;
sputtering;
surface morphology;
thin films;
titanium compounds;
Scherrer formula;
TiSiN;
energy dispersive spectroscopy;
grain size;
grazing incidence X-ray diffraction;
mechanical properties;
microstructure;
nanocomposite;
nitrogen flow ratio;
quasi-amorphous microstructure;
reactive magnetron co-sputtering;
Ti-Si-N;
nanoindentation;
thin film;
40.
A new design methodology for electro-mechanical Sigma- Delta-Modulators
机译:
机电Sigma-Delta调制器的新设计方法
作者:
Jian Luo
;
Haitao Ding
;
Kraft M.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
accelerometers;
micromechanical devices;
sigma-delta modulation;
analog-to-digital conversion;
bulk micromachined accelerometer;
capacitive accelerometer;
electromechanical sigma-delta-modulators;
force-feedback loop;
microelectromechanical systems;
micromachined sensing element;
Force Feedback;
MEMS accelerometer;
Sigma-Delta modulation ((SDM);
Systematic design;
41.
Application of microfluidic system to construct cross-linked chitosan microfibers by PDMS chip
机译:
PDMS芯片在微流控系统构建交联壳聚糖微纤维中的应用
作者:
Chia-Hsien Yeh
;
Po-Wen Lin
;
Qiaole Zhao
;
Tsung-Che Chou
;
Yu-Cheng Lin
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
bioMEMS;
cellular biophysics;
fibres;
hydrodynamics;
lab-on-a-chip;
laminar flow;
microfluidics;
organic compounds;
soft lithography;
tissue engineering;
MEMS;
PDMS chip;
STPP solution;
cell culture;
cross-junction angle;
cross-junction microchannel;
cross-linked chitosan microfibers;
fibroblast cells;
hydrodynamic focusing;
microfluidic system;
polydimethylsiloxane microfluidic chip;
scaffold;
schwann cells;
sodium tripolyphosphate;
Chitosan solution;
chitosan microfibers;
microfluidic chip;
42.
Characterization of Si
3
N
4
/SiC Microstructure Derived from UV curable polymer ceramic precursor pyrolyzing
机译:
紫外光固化聚合物陶瓷前驱体热解得到的Si
3 inf> N
4 inf> / SiC微结构的表征
作者:
Wang Ya-Zhou
;
Chen Li-Xin
;
Song Jia-Le
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
X-ray diffraction;
crystal microstructure;
curing;
differential thermal analysis;
polymers;
pyrolysis;
scanning electron microscopy;
silicon compounds;
transmission electron microscopy;
FE-SEM;
Sisub3/subNsub4/sub-SiC;
Sisub3/subNsub4/sub/SiC microstructure;
TEM;
TGA-DTA;
UV curing;
XRD;
crystallinity;
electron spectrometer;
polymer ceramic precursor;
pyrolysate;
temperature 1400 degC;
temperature 1600 degC;
temperature 358 degC;
temperature 450 degC;
time 2 h;
time 24 h;
weight loss rate;
Characterization;
43.
Calibration of MEMS accelerometer based on plane optical tracking technique and measurements
机译:
基于平面光学跟踪技术和测量的MEMS加速度计校准
作者:
Zhuxin Dong
;
Wejinya U.C.
;
Li W.J.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
accelerometers;
gyroscopes;
microsensors;
optical tracking;
MEMS accelerometer;
calibration;
human hand motions;
magnetometers;
microcontroller;
plane optical tracking technique;
real time estimation;
ubiquitous digital writing instrument;
Acce03lerometer;
Digital Writing System;
MAG-µIMU;
MEMS;
44.
Design of a novel MEMS IDT dual axes surface acoustic wave gyroscope
机译:
新型MEMS IDT双轴声表面波陀螺仪的设计
作者:
Qinghui Liu
;
Xuezhong Wu
;
Di Di
;
Peitao Dong
;
Dapeng Fan
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
angular velocity;
gyroscopes;
interdigital transducers;
microsensors;
MEMS IDT;
dual axes surface acoustic wave gyroscope;
interdigital transducer;
Dual axes gyroscope;
Surface Acoustic Wave resonator;
Surface Acoustic Wave sensor;
effect of Coriolis force;
metallic dot array;
45.
Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package integration
机译:
用于3D封装系统集成的基于RIE的深度穿硅微加工研究
作者:
Min Miao
;
Yufeng Jin
;
Hongguang Liao
;
Liwei Zhao
;
Yunhui Zhu
;
Xin Sun
;
Yunxia Guo
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
electronics packaging;
interconnections;
microassembling;
micromachining;
network analysis;
system-in-package;
3-D packaging;
3-D system-in-package integration;
Si;
bottom-up blind-via filling;
cell-string evolution algorithm;
deep RIE-based through-silicon-via;
defense electronics;
electroplating;
heterogeneous microdevices;
industrial electronics;
nanodevices;
optimal deposition parameters;
periodic pulse reverse current plating;
physical modeling;
process simulator;
seed layers;
vital vertical interconnect;
Bulk Mi;
46.
State engine based validation of MEMS process sequences
机译:
基于状态引擎的MEMS工艺流程验证
作者:
Xu Zhao
;
Xin Zhao
;
Guizhang Lu
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
expert systems;
knowledge verification;
microfabrication;
MEMS pipeline;
MEMS process sequences;
process knowledge;
state engine;
validation;
MEMS;
expert system;
process rules;
47.
Exploring the potential of microarray technology for bioano sensing
机译:
探索微阵列技术在生物/纳米传感方面的潜力
作者:
Ju Seok Lee
;
Joon Jin Song
;
Deaton R.
;
Jin-Woo Kim
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
DNA;
biosensors;
genomics;
lab-on-a-chip;
molecular biophysics;
nanobiotechnology;
nanosensors;
DNA detection system;
biosensing device;
genomic screening;
limit-of-detection;
limit-of-quantification;
microarray technology;
minimum fluorophore concentration;
nanosensing device;
signal detection;
bioano sensing;
limit of detection;
limit of quantification;
microarray;
nano-biotechnology;
48.
Raman descrimination of Helicobacter pylori fingerprint in dielectrophoresis chip
机译:
介电泳芯片中幽门螺杆菌指纹的拉曼鉴别
作者:
Chi-Chang Lin
;
Ying-Mei Yang
;
Hsien-Chang Chang
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
Raman spectroscopy;
bio-optics;
biomedical measurement;
cancer;
electrophoresis;
lab-on-a-chip;
microorganisms;
tumours;
3 dimension dielectrophoresis chip;
DEP chips;
H. pylori strain;
HCA analysis;
Helicobacter pylori fingerprint;
Raman scattering technique;
clinical bacteria analysis;
clinical specimen analysis;
dielectrophoresis chip;
duodenal ulcer;
gastric cancer;
in situ detection;
rapid detection method;
rapid identification function;
rapid trapping method;
Helicobactor pylori;
Raman;
dielectrophoretic;
fingerpri;
49.
Keynote lecture 3: “MEMS as tools for nanotechnology”
机译:
主题演讲3:“ MEMS作为纳米技术的工具”
作者:
Staufer Urs
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
50.
Keynote lecture 4: “Nanotechnology tools for life sciences”
机译:
主题演讲4:“用于生命科学的纳米技术工具”
作者:
Heinzelmann Harry
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
51.
Electron mobility in enhanced N-type silicon nanowire MOSFET
机译:
增强型N型硅纳米线MOSFET中的电子迁移率
作者:
Jie Chen
;
Tao Guo
;
Hang Guo
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
MOSFET;
Monte Carlo methods;
dielectric materials;
electron mobility;
elemental semiconductors;
nanoelectronics;
nanowires;
scattering;
silicon;
surface roughness;
2D Monte Carlo method;
Si;
electronic state;
enhanced N-type silicon nanowire MOSFET;
high dielectric constant material;
metal-oxide-semiconductor field effect transistor;
quantum transport;
scattering mechanics;
Monte Carlo method;
nanowire MOSFET;
surface roughness scattering;
52.
Fabrication of seamless roller mold with excimer laser direct writing technology
机译:
利用准分子激光直写技术制造无缝辊模具
作者:
Yung-Chun Lee
;
Pin-Chang Chen
;
Hung-Yi Lin
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
etching;
excimer lasers;
laser beam machining;
laser materials processing;
moulding;
KrF;
digital image processing;
excimer laser;
glass roller;
laser direct writing;
laser machining;
metal thin film;
seamless roller mold;
wet etching;
micro-structures;
rollerimprinting;
53.
Integrated high sensitivity displacement sensor based on micro ring resonator
机译:
基于微环谐振器的集成式高灵敏度位移传感器
作者:
Xin Liu
;
Chenyang Xue
;
Shubin Yan
;
Jijun Xiong
;
Wendong Zhang
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
III-V semiconductors;
aluminium compounds;
cantilevers;
displacement measurement;
finite element analysis;
focused ion beam technology;
gallium arsenide;
micromechanical resonators;
microsensors;
optical resonators;
photoelasticity;
sputter etching;
waveguides;
FIB;
GaAs-Alsub0.6/subGasub0.4/subAs;
GaAs-AlGaAs;
MEMS sensors;
RIE etching;
beam propagation method simulation;
bus waveguide;
cantilever deformation;
finite element method simulations;
focused ion beam;
high-index contrast;
mass transmission spectrum;
54.
Influence of the bearing number on micro gas bearing system
机译:
轴承数量对微型气体轴承系统的影响
作者:
Cheng-Chi Wang
;
Her-Terng Yau
;
Yen-Liang Yeh
;
Ming-Jyi Jang
;
Jing-Fung Lin
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
finite difference methods;
machine bearings;
micromechanical devices;
nonlinear dynamical systems;
rotors;
bifurcation behavior;
complex dynamic behavior;
differential transformation method;
finite difference method;
microgas film rotor-bearing systems;
rigid rotor;
bearing number;
micro gas bearing;
55.
Improvement of Au cantilever fabrication process with Cu as a sacrificial layer
机译:
以铜为牺牲层的金悬臂制造工艺的改进
作者:
Qiang Liu
;
Bo Liu
;
Zhihong Li
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
cantilevers;
copper;
corrosion;
electroplating;
etching;
gold;
internal stresses;
Au;
Au cantilever;
Cu;
Cu sacrificial layer;
corrosion process;
electroplate;
nickel resist;
residual stress;
wet etch;
56.
DC electrical trimming characteristics of polysilicon nanofilms with different doping concentrations
机译:
不同掺杂浓度的多晶硅纳米薄膜的直流电修整特性
作者:
Chang-Zhi Shi
;
Xiao-Wei Liu
;
Rong-Yan Chuai
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
annealing;
boron;
chemical vapour deposition;
current density;
elemental semiconductors;
impurity distribution;
interstitials;
ion implantation;
nanostructured materials;
resistors;
semiconductor doping;
semiconductor growth;
semiconductor thin films;
silicon;
vacancies (crystal);
DC current;
DC electrical trimming;
Joule heat;
LPCVD;
Si;
Si:B;
boron ion-implantation;
doping concentrations;
grain boundaries;
interstitial-vacancy model;
polysilicon nanofilms;
post-annealing;
resistance;
temperature 620 degC;
trimmed resistor;
57.
Silicon Nanowire fabricated by MEMS technology and its application in biochemical detection
机译:
MEMS技术制备的硅纳米线及其在生化检测中的应用
作者:
Yibin Gong
;
Huamin Gao
;
Xiang Liu
;
Wenping Liu
;
Tie Li
;
Ping Zhou
;
Yuelin Wang
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
biosensors;
chemical sensors;
elemental semiconductors;
etching;
microsensors;
nanowires;
silicon;
DC response;
MEMS technology;
Si;
anisotropic self-stop etching;
antigen detection;
batch production;
biochemical detection;
biosensor;
electrical characterization;
field effect;
linear resistance modulation;
sensor sensitivity;
silicon nanowire;
size 10 nm;
FET;
MEMS;
58.
Plenary lecture 2: “Nanoscale field-effect transistors for flexible displays”
机译:
全体会议演讲2:“用于柔性显示器的纳米级场效应晶体管”
作者:
Klauk Hagen
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
59.
Plenary lecture 4: “Nano robotic manipulation and assembly for manufacturing nano sensors and devices”
机译:
全体会议演讲4:“用于制造纳米传感器和设备的纳米机器人操纵和组装”
作者:
Xi Ning
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
60.
Integration micro-magnetic sensor and accelerometer microsystem for orienting application
机译:
集成微磁传感器和加速度计微系统,用于定向应用
作者:
Weihua Li
;
Wenzhong Lou
;
Xin Li
;
Rongsen Hong
;
Liang Hu
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
accelerometers;
magnetic sensors;
microsensors;
Matlab Wavelet toolbox;
accelerometer microsystem;
hardware platform;
micromagnetic sensor;
pitch angles;
reference coordinate;
signal processing toolbox;
Accelerometer;
Algorithm;
Integration;
Magnetic sensor;
Orienting;
Simulation;
61.
Keynote Lecture 1: “Femtoliter chamber for single-molecule and single-cell analysis”
机译:
主题演讲1:“用于单分子和单细胞分析的飞升室”
作者:
Noji Hiroyuki
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
62.
Keynote Lecture 2: “Towards emergence of new function by engineering materials: Colloidal nanocrystal based structures for opto-electronic, sensing and biomedical applications”
机译:
主题演讲2:“通过工程材料实现新功能的出现:用于光电,传感和生物医学应用的基于胶体纳米晶体的结构”
作者:
Curri M. Lucia
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
63.
Anticancer drug delivery for tumor targeting and therapy
机译:
抗肿瘤药物的靶向和治疗
作者:
Yu Jin Kim
;
Il-Kyu Park
;
Jin Soo Kim
;
Joon Hwang
;
Eui-Sik Chung
;
Kang Moo Huh
;
Yong-kyu Lee
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
Fourier transform spectra;
biomedical NMR;
cancer;
coagulation;
drugs;
infrared spectra;
light scattering;
nanoparticles;
patient treatment;
proton magnetic resonance;
transmission electron microscopy;
tumours;
ultraviolet spectra;
sup1/supH-NMR;
DLS;
FT-IR spectra;
Fourier transform infrared spectra;
TEM;
UV-spectrometry;
anticancer drug delivery;
anticancer drug retinoid;
cancer treatment;
dynamic light scattering;
heparin;
polymeric carrier polysaccharide heparin;
proton nuclear magnetic resonance;
targeting ligan;
64.
Numerical investigation of biochemical binding kinetics on the microfluidic chip with FO-LPR
机译:
FO-LPR在微流控芯片上生化结合动力学的数值研究
作者:
Chun-Ping Jen
;
Ching-Te Huang
;
Yun-Hung Lu
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
bioMEMS;
biochemistry;
biosensors;
fibre optic sensors;
gold;
injection moulding;
microfluidics;
microsensors;
monolayers;
nanoparticles;
polymers;
Au;
FO-LPR;
FO-LPR microfluidic chip design;
biochemical binding kinetics;
biosensing platform;
colloidal gold surface;
evanescent wave absorption measurement;
fiber-optic localized plasma resonance;
gold nanoparticle monolayer;
microinjection molding;
nanoparticle-modified optical fiber;
polymethylmethacrylate;
reaction microchannel;
size 18.1 mm;
size 400 mum;
size 950 mum;
65.
Memory characteristics of double-layer metal and semiconductor heterogeneous nanocrystals embedded in SiO
2
机译:
SiO
2 inf>中嵌入的双层金属和半导体异质纳米晶体的存储特性
作者:
Henan Ni
;
Liangcai Wu
;
Zhitang Song
;
Chun Hui
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
MOS capacitors;
electron traps;
elemental semiconductors;
hole traps;
nanostructured materials;
nickel;
random-access storage;
self-assembly;
semiconductor storage;
silicon;
silicon compounds;
tunnelling;
MOS capacitor structure;
Ni-Si-SiOsub2/sub;
charge storage capacity;
charge trap layer;
direct tunneling mechanism;
double-layer metal-semiconductor heterogeneous nanocrystals;
flat voltage shift;
gate oxide;
nonvolatile memory;
retention time;
self-assembled nickel nanocrystals;
vacuum electron-beam coevaporated;
66.
Effects of wall temperature on the heat and mass transfer in microchannels using the DSMC method
机译:
使用DSMC方法的壁温对微通道中传热和传质的影响
作者:
Jianjun Ye
;
Jian Yang
;
Jinyang Zheng
;
Ping Xu
;
Chikong Lam
;
Leong Wong
;
Yanbao Ma
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
Monte Carlo methods;
heat transfer;
microchannel flow;
direct simulation Monte Carlo method;
mass transfer;
microchannel;
microelectro-mechanical systems;
microfluidic systems;
nanoelectro-mechanical systems;
rarefied nitrogen gas flows;
temperature 200 K to 800 K;
DSMC;
Heat flux;
Mass flux;
Micro-fluidics;
Pressure boundary conditions;
67.
Cell affinity of PHBV thin films evaluated by a parallel plate flow chamber
机译:
用平行板流动室评估PHBV薄膜的细胞亲和力
作者:
Yuping Zhang
;
Yanyan Wang
;
Lanxin Lv
;
Shancheng Yan
;
Haitao Wang
;
Yong Zhang
;
Zhu D.
;
Ningping Huang
;
Zhongdang Xiao
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
biomedical materials;
cellular biophysics;
laminar flow;
plasma applications;
polymer films;
PHBV thin films;
anhydrous ammonia gaseous plasma treatment;
cell affinity;
mouse 3T3 fibroblast cells;
parallel plate flow chamber;
poly(3-hydroxybutyric acid-co-3-hydroxyvaleric acid);
Poly(3-hydroxybutyric acid-co-3-hydroxyvaleric acid) (PHBV);
parallel plate flow chamber (PPFC);
plasma treatment;
68.
Effect of opposite side electrodes in organic field-effect transistor structure
机译:
相对侧电极对有机场效应晶体管结构的影响
作者:
Jaisutti R.
;
Yamwong W.
;
Pratontep S.
;
Osotchan T.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
electrodes;
field effect transistors;
organic semiconductors;
gate electrode;
gate voltage;
nanoscale devices;
opposite side electrodes;
organic field effect transistor;
pentacene;
2-D simulation;
opposite side electrode;
69.
Signal modulation schemes comparison in the telemetry unit for retinal prosthesis system
机译:
视网膜假体系统遥测单元中信号调制方案的比较
作者:
Yuexian Zou
;
Yali Zheng
;
Yufeng Jin
;
Guangyi Shi
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
amplitude shift keying;
biomedical electrodes;
biomedical telemetry;
eye;
frequency shift keying;
microelectrodes;
phase shift keying;
prosthetics;
vision defects;
ASK;
FSK;
PSK;
demodulator design;
microelectrode array;
modulator design;
power transmission;
retinal prosthesis system;
signal modulation schemes;
telemetry unit;
vision restoration;
visual impairment;
PWM;
modulation;
retinal prosthesis;
70.
Research and evaluation of a high temperature pressure sensor chip
机译:
高温压力传感器芯片的研究与评估
作者:
Zhuangde Jiang
;
Libo Zhao
;
Yulong Zhao
;
Prewett P.D.
;
Jiang K.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
boron;
gold;
high-temperature techniques;
ion implantation;
microsensors;
packaging;
photolithography;
piezoresistive devices;
platinum;
pressure sensors;
silicon compounds;
titanium;
MEMS;
SIMOX technology;
Si;
SiOsub2/sub-B-SiN-Ti-Pt-Au;
Wheatstone bridge configuration;
beam lead layer;
bonding;
boron ion implantation doping layer;
electron volt energy 200 keV;
frequency 694.4 kHz;
gold wires;
high temperature packaging;
high temperature sensor chip;
oxygen implantation;
photolithographic patterning;
piezoresistive;
71.
A DEP chip with arc-shape microelectrode arrays for the separation of different-size particles
机译:
具有弧形微电极阵列的DEP芯片,用于分离不同尺寸的颗粒
作者:
Cheng-Hsin Chunag
;
Yu-Chi Chen
;
You-Ming Hsu
;
Huei-Sheng Huang
;
Fei-Bin Hsiao
;
Chin-Hung Wang
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
bioelectric phenomena;
cellular biophysics;
electrochemical electrodes;
electrophoresis;
microelectrodes;
microfluidics;
particle size;
arc-shape microelectrode arrays;
bioparticles;
concave-arc shape;
convex-arc shape;
dielectric properties;
dielectrophoretic force;
electrode shapes;
fluid flow;
microchannel direction;
microfluidic chip;
negative dielectrophoresis;
polystyrene particles;
trapezoidal shape;
Dielectrophoresis;
Microfluidic;
Separtation;
72.
New pumping mechanism by surface waves in a microchannel
机译:
通过微通道中的表面波的新泵送机制
作者:
Tzong-Shyng Leu
;
Horng-Jiann Song
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
acoustic resonance;
acoustic streaming;
elastic waves;
microchannel flow;
micropumps;
oscillations;
surface acoustic waves;
surface waves (fluid);
acoustic pumping mechanism;
flexural plate wave;
fluid motion;
microchannel;
oscillating surface;
pressure wave resonant property;
sound field;
surface acoustic streaming;
surface waves;
velocity profile;
micro channel;
micro pump;
73.
On the mechanical behavior of LIGA nickel
机译:
关于LIGA镍的力学行为
作者:
Guang He
;
Geng-Chen Shi
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
LIGA;
Young's modulus;
indentation;
nickel;
tensile strength;
yield strength;
LIGA nickel material;
MEMS;
Ni;
nanolndentation;
tensile tests;
yield strengths;
Strength;
74.
Micropattern-assisted nanoassembly: Ordered nanocolloidal array on PEG microstructures
机译:
微型图案辅助的纳米组装:PEG微结构上的有序纳米胶体阵列
作者:
Hailin Cong
;
Revzin A.
;
Tingrui Pan
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
colloids;
hydrogels;
nanofabrication;
nanopatterning;
photolithography;
plasma materials processing;
self-assembly;
surface energy;
PEG microstructures;
PEG microwells;
SiOsub2/sub;
glass substrates;
micropattern-assisted nanoassembly;
ordered nanocolloidal array;
oxygen plasma treatment;
photopatternability;
polyethylene glycol hydrogel;
polymer surface;
Colloid;
Nanoassembly;
Polyethylene Glycol;
75.
Design and modeling of a tunable optical antenna enabled by a micromachined actuator
机译:
由微机械致动器实现的可调谐光学天线的设计和建模
作者:
Penmetsa S.
;
Tianhua Zhang
;
Zhongcheng Gong
;
Tae-woo Lee
;
Que L.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
actuators;
bow-tie antennas;
finite difference time-domain analysis;
micro-optomechanical devices;
micromachining;
optical sensors;
2-D surface scanning;
FDTD;
MEMS;
bowtie antenna;
field localization;
finite difference time domain method;
micromachined actuator;
optical antenna;
nanophotonics;
thermal actuator;
76.
Technical program
机译:
技术程序
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
77.
Effect of sacrificial layer compliance on thermal stresses of composite MEMS beams
机译:
牺牲层柔度对复合MEMS梁热应力的影响
作者:
Jin Qiu
;
Cunningham S.
;
Morris A.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
beams (structures);
finite element analysis;
micromechanical devices;
plasticity;
thermal stresses;
compliant sacrificial layer;
composite MEMS beams;
thermal mismatch stress;
composite beam curvature;
metal plasticity;
sacrificial MEMS process;
switched capacitor;
thermal residual stress;
78.
Microfluidic high viability separation of neural cells
机译:
神经细胞微流高存活力分离
作者:
Zhigang Wu
;
Wicher G.
;
Svenningsen A.F.
;
Hjort K.
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
bioMEMS;
cellular biophysics;
flow measurement;
microfluidics;
polymer solutions;
aqueous polymer solution;
biopsy;
cell culture;
cell separation;
central nerve system;
flow cytometry;
hydrodynamic spreading;
neural cell regeneration therapy applications;
neural cells;
high viability;
microfluidic;
separation;
79.
Chip scale atomic magnetometer based on SERF
机译:
基于SERF的芯片级原子磁力仪
作者:
Song Xing
;
Dong Haifeng
;
Fang Jiancheng
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
Zeeman effect;
laser beams;
magnetometers;
micromirrors;
atomic Zeeman transitions;
atomic vapor;
chip scale atomic magnetometer;
detection scheme;
laser beam probing;
laser beam pumping;
light path arrangement;
microreflective mirrors;
millimeter-scale micromachined enclosures;
spin exchange relaxation free method;
Atomic Magnetometer;
MEMS;
Micro mirrors;
SERF;
80.
Fabrication of bulk titanium out-of-plane microneedles
机译:
大块钛面外微针的制造
作者:
Gang Zhao
;
Wen Li
;
Guanrong Tang
;
Jing Chen
会议名称:
《Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009》
|
2009年
关键词:
bioMEMS;
drug delivery systems;
fracture toughness;
masks;
microfabrication;
nanoporous materials;
nanotechnology;
needles;
oxidation;
sputter etching;
titanium compounds;
Ti;
TiOsub2/sub;
aqueous oxidation;
drug loading;
isotropic wet etching technology;
mask material;
nanostructured porous titania;
polished chemical pure titanium substrate;
pyramidal needle structures;
substrate material;
titanium out-of-plane microneedle fabrication;
bulk titanium;
microneedles;
out-of-plane;
titania;
wet etching;
意见反馈
回到顶部
回到首页