AEROSOL-FREE VESSEL FOR BUBBLING CHEMICAL PRECURSORS IN A DEPOSITION PROCESS

摘要

PATHaerosols travel and vessel () INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 18 October 2018 (18.10.2018) W I PO I PCT omit VIII °nolo VIII VIII VIII no oimIE (10) International Publication Number WO 2018/191125 Al Figure 1 o (51) International Patent Classification: C23C 16/448 (2006.01) C23C 16/52 (2006.01) (21) International Application Number: PCT/US2018/026535 (22) International Filing Date: 06 April 2018 (06.04.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/483,784 10 April 2017 (10.04.2017) US (71) Applicant: VERSUM MATERIALS US, LLC [US/US]; 8555 S. River Parkway, Tempe, AZ 85284 (US). (72) Inventors: BIRTCHER, Charles Michael; 8555 S. River Parkway, Tempe, AZ 85284 (US). VIVANCO, Gildardo; 8555 S. River Parkway, Tempe, AZ 85284 (US). IVANOV, Sergei V.; 8555 S. River Parkway, Tempe, AZ 85284 (US). SHEEHY, William; 8555 S. River Parkway, Tempe, AZ 85284 (US). STEIDL, Thomas Andrew; 8555 S. River Parkway, Tempe, AZ 85284 (US). (74) Agent: ROSSI, Joseph D. et al.; Stradley Ronon Stevens & Young, LLP, 30 Valley Stream Parkway, Great Valley Corporate Center, Malvern, PA 19355 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, = (54) Title: AEROSOL-FREE VESSEL FOR BUBBLING CHEMICAL PRECURSORS IN A DEPOSITION PROCESS EXIT vapor exits the vessel ENTRANCE aerosols enter the vessel kt) 0 .-- f - 5 (57) : Described herein are aerosol-free vessels, delivery containers, systems and methods using same for providing improve- ments to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The clog- ging of valves and piping as some precursors decompose vapor are minimized This invention prevents mist from forming and thus preventing clogging or wafer contamination from aerosols. [Continued on next page] WO 2018/191125 Al MIDEDIMOMONIIME10130MMOEHOHOMOVOIS TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))