AEROSOL-FREE VESSEL FOR BUBBLING CHEMICAL PRECURSORS IN A DEPOSITION PROCESS

摘要

Described herein are aerosol-free vessels, delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The clogging of valves and piping as some precursors decompose vapor are minimized. This invention prevents mist from forming and thus preventing clogging or wafer contamination from aerosols.