METHOD FOR FORMING PATTERN ON LATERAL EPITAXIAL THIN FILM BY SELF-ALIGNMENT, AND PREPARING EPITAXIAL MATERIAL

摘要

The present disclosure provides a method for forming a pattern on a lateral epitaxial thin film by self-alignment, comprising: preparing a patterned substrate; preparing, on the patterned substrate, a surface-merged lateral epitaxial thin film by means of laterally epitaxially merged growth; and performing exposure treatment on the back of the patterned substrate, and forming a pattern on the lateral epitaxial thin film by self-alignment.