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Modeling the mechanical deformation of nickel foils for nanoimprint lithography on double-curved surfaces

机译:双曲面纳米压印光刻镍箔机械变形模型

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摘要

In the present work, a manufacturing process for transferring nano-structures from a glass wafer, to a double-curved insert for injection moulding is demonstrated. A nano-structure consisting of sinusoidal cross-gratings with a period of 426 nm is successfully transferred to hemispheres on an aluminium substrate with three different radii; 500 μm, 1000 μm and 2000 μm, respectively. The nano imprint is performed using a 50 μm thick nickel foil, manufactured using electroforming. During the imprinting process, the nickel foil is stretched due to the curved surface of the aluminium substrate. Experimentally, it is possible to address this stretch by counting the periods of the cross-gratings via SEM characterization. A model for the deformation of the nickel foil during nanoimprint is developed, utilizing non-linear material and geometrical behaviour. Good agreement between measured and numerically calculated stretch ratios on the surface of the deformed nickel foil is found, and it is shown, that from the model it is also possible to predict the geometrical extend of the nano-structured area on the curved surfaces.
机译:在当前的工作中,展示了一种用于将纳米结构从玻璃晶圆转移到用于注射成型的双弯曲插件的制造方法。由周期为426 nm的正弦交叉光栅组成的纳米结构已成功转移到具有三个不同半径的铝基板上的半球中。分别为500μm,1000μm和2000μm。使用通过电铸制造的50μm厚的镍箔执行纳米压印。在压印过程中,镍箔由于铝基板的弯曲表面而被拉伸。实验上,可以通过SEM表征计算交叉光栅的周期来解决这一问题。利用非线性材料和几何行为,开发了纳米压印过程中镍箔变形的模型。发现在变形的镍箔表面上的测量拉伸比和数值计算的拉伸比之间具有良好的一致性,并且表明,根据该模型,还可以预测弯曲表面上的纳米结构区域的几何延伸。

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