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Depth profiling of a CdS buffer layer on CuInS2 measured with X-ray photoelectron spectroscopy during removal by HCl etching

机译:通过HCl蚀刻在除去期间用X射线光电子体光谱测量的CDS缓冲层的深度分析

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摘要

A ~ 35 nm thick CdS buffer layer has been wet-chemically deposited on a CuInS2 thin layer solar cell absorber and subsequently removed through a stepwise HCl etch process. Sequential etching times of two and three seconds were initially performed to gradually remove the CdS top-layer and leave the CuInS2 surface intact. After each step an investigation of the sample with X-ray photoelectron spectroscopy was used to determine the stoichiometry and elemental binding energies of the sample surface. After the removal of the CdS layer longer etching times were used to study the long-term effects of the HCl. The resulting depth profile revealed Cu diffusion from the CuInS2 into the CdS, although the Cu atoms did not reach the surface of the buffer layer. In addition, a Cd containing layer was left on the sample surface after more than six hours of etching time and is apparently insoluble in HCl, showing that the Cd-S bonds in this layer differ from those in CdS. This method can also be used with other top-layers to create depth profiles.
机译:在Cuins2薄层太阳能电池吸收器上湿化化学沉积〜35nm厚的CDS缓冲层,随后通过逐步的HCl蚀刻工艺除去。最初进行两三秒的顺序蚀刻时间以逐渐拆下CDS顶层并使CUINS2表面完整。在每步后,使用X射线光电子能谱对样品进行研究来确定样品表面的化学计量和元素结合能。在去除CDS层较长的蚀刻时间后,用于研究HCl的长期效果。所得到的深度曲线显示Cu从CuinS2扩散到CD中,尽管Cu原子没​​有到达缓冲层的表面。另外,在蚀刻时间超过6小时后,将含Cd的层放在样品表面上,并且显然不溶于HCl,表明该层中的CD-S键与Cd中的CD键不同。此方法还可以与其他顶层一起使用以创建深度配置文件。

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