离子注入层的X射线光电子能谱分析

摘要

W ions extracted from a metal vapor vacuum arc ion source were implanted into H13 steel,with an implantation dose of 3×1017cm-2,extraction acceleration 30kV,and average ion beam flux about 15μA*cm-2.Observation of chemical structure of W,Fe, O elements in H13 steel was carried out by X-ray photoelectron spectroscopy（XPS）.Experimental results show that the oxidation of Fe is lightened after W ion implantation.The oxidation mechanisms of H13 was discussed according to the experimental results.%采用金属蒸汽真空弧（MEVVA）离子源发出的强束流脉冲钨离子，对H13钢进行了离子注入表面改性研究。借助X射线光电子能谱仪（XPS）考察了注入表面层中钨、氧、铁的化学状态。研究发现，钨离子注入层中钨元素以替位钨和三氧化钨形式存在，铁元素以金属铁和三氧化二铁形式出现，而且各价态元素的原子比随深度而变化。