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X-RAY PHOTOELECTRON SPECTROSCOPY DEVICE AND X-RAY PHOTOELECTRON SPECTROSCOPY METHOD

机译:X射线光电子能谱装置及X射线光电子能谱方法

摘要

PROBLEM TO BE SOLVED: To provide an X-ray photoelectron spectroscopy device and an X-ray photoelectron spectroscopy method capable of accurately acquiring the energy spectrum of photoelectrons discharged from a measurement object in a short time.;SOLUTION: The energy spectrum obtained by a detector 40 when an electron 4 generated in a measurement object 2 by the irradiation of an X-ray 3 outputted from an X-ray source 10 reaches the detector 40 through an electron lens 20 and an energy analyzer 30 is corrected on the basis of the energy spectrum obtained by the detector 40 as the one of a band equivalent to an inhibition band more on the low constraint energy side than the Fermi level of the measurement object 2 with the adjustment of the deceleration of the electron 4 by the electron lens 20.;COPYRIGHT: (C)2012,JPO&INPIT
机译:解决的问题:提供一种能够在短时间内准确地获取从测量对象释放的光电子的能谱的X射线光电子能谱装置和X射线光电子能谱方法。当通过从X射线源10输出的X射线3的照射在测量对象2中产生的电子4通过电子透镜20到达检测器40并且能量分析器30被校正时,检测器40被校正。通过电子透镜20对电子4的减速度进行调整,由检测器40获得的能谱是比测量对象2的费米能级低得多的,比低约束能侧的抑制带等价的带之一。 ;版权:(C)2012,JPO&INPIT

著录项

  • 公开/公告号JP2011247870A

    专利类型

  • 公开/公告日2011-12-08

    原文格式PDF

  • 申请/专利权人 HAMAMATSU PHOTONICS KK;

    申请/专利号JP20100274407

  • 发明设计人 MOCHIZUKI TAKAHIRO;

    申请日2010-12-09

  • 分类号G01N23/227;

  • 国家 JP

  • 入库时间 2022-08-21 17:38:46

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