Iterative Magnetic/Structural Simulation of a MEMS Micro-shutter

摘要

A finite element model has been created that simulates the magnetic actuation of a cobalt-iron covered, 0.5micron thick, silicon nitride micro-shutter. The micro-shutter will be used as a transmissible filter in a space-based Multi-object Spectrograph (MOS). A laminated tri-pole permanent magnet is scanned across an array of shutters. The applied magnetic force twists the shutter's torsion hinge and actuates the shutter from the closed, 0 degree position, to the open, 90 degree position. A sequential analysis method was selected. This method uses the interaction between the magnetic and structural fields and is accomplished via the load vectors. The simulation results are compared to experimental measurements of fabricated micro-shutter devices.