Manufacturing of 6-ich GaAs substrates by the VB method

摘要

6-inch GaAs Manufacturing systems for producing 6-inch GaAs substrates are refined by optimizing the Vertical Boat (VB) method and the wafer polishing process. Introduction of low cost facilities leads to reduced manufacturing cost. The Taguchi method assists in realization of a furnace structure with stable thermal environment and of polishing conditions resulting in stable surface quality. New production facilities have been constructed to maintain consistently high production quality.