Si-piezoresistive microcantilevers for highly integrated parallel force detection applications

摘要

We have developed an integrated and compact microdevice consisting of piezoresistive microcantilevers with a dedicated electronic readout. This microdevice designed for force sensor applications can also be used in atomic force microscopy for parallel operation without an optical detection scheme. The system features a 1.25 V/mu m resolution with 10 mV noise. (C) 2005 Elsevier B.V. All rights reserved.