FABRICATION AND CHARACTERIZATION OF CANTILEVERS WITH INTEGRATED SHARP TIPS AND PIEZOELECTRIC ELEMENTS FOR ACTUATION AND DETECTION FOR PARALLEL AFM APPLICATIONS

摘要

We have developed a new process to fabricate arrays of cantilevers with integrated tips for atomic force microscope (AFM) imaging and a piezoelectric layer for vertical actuation and detection. A good homogeneity of the tip shape is obtained thanks to a self-sharpening effect. The cantilevers have been characterized mechanically and electrically. [References: 9]