Cantilever construction composed of multiple actuators for AFM, AFM system having the cantilever construction and measurement method for properties of material by using the AFM

摘要

PURPOSE: A cantilever structure for AFM(Atomic Force Microscopy) having multiple actuators, an AFM system including the cantilever structure and a method for measuring properties of material using the AFM are provided to exactly measure a shape of the surface of a sample and chemical and physical properties of the sample by having the cantilever capable of acting into a twisting mode and a bending mode. CONSTITUTION: A cantilever structure for AFM(Atomic Force Microscopy) having multiple actuators includes a plate type base(330), a projection(335) formed at a side of the base, a probe(340) formed on a lower surface of the projection, first and second actuators(310,320) corresponding to each other from the projection to an upper portion of the base and respectively applied with voltage, and first and second bond pads(350,351) formed on the lower surface of the base and connected to the first and second actuators. The first and second actuators have lower electrodes respectively formed from a lower center part of the projection to the other lower surface of the base. A third bond pad(352) is formed at the other lower surface of the base and connected to the lower electrode.