Integrated Resonant Dual-Microcantilevers Combined Sensor with Accurate Identification and Highly-Sensitive Detection to H

机译：集成谐振双微悬臂组合传感器，具有对H的精确识别和高灵敏度检测

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This paper shows a novel integrated resonant dual-microcantilevers combined gas sensor which can identify and detect trace-level H

机译：本文展示了一种新型集成共振双微悬臂组合气体传感器，该传感器可以识别和检测痕量水平的H

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《International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII》|2019年|338-341|共4页
会议地点 Berlin(DE)
作者
Lei Tang; Pengcheng Xu; Ming Li; Haitao Yu; Xinxin Li;
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State Key Lab of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences 200050 CHINA;

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Hydrogen; Silicon; Gas detectors; Etching; Resonant frequency;

机译：氢;硅;气体检测仪；蚀刻；共振频率;

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专利

1. H2S gas sensor based on integrated resonant dual-microcantilevers with high sensitivity and identification capability [J] . Lei Tang, Pengcheng Xu, Ming Li, 中国化学快报（英文版） . 2020,第008期

机译：基于集成共振双微悬臂梁的H2S气体传感器，具有高灵敏度和识别能力
2. Mesoporous Thin-Film on Highly-Sensitive Resonant Chemical Sensor for Relative Humidity and CO_(2) Detection [J] . Hyunjoo J. Lee, Kwan Kyu Park, Mario Kupnik, Analytical chemistry . 2012,第7期

机译：用于相对湿度和CO_（2）检测的高灵敏度共振化学传感器上的中孔薄膜
3. Colorimetric sensor array for accurate detection and identification of antioxidants based on metal ions as sensor receptors [J] . Talanta: The International Journal of Pure and Applied Analytical Chemistry . 2020,第期

机译：比色传感器阵列，用于基于金属离子作为传感器受体的准确检测和鉴定抗氧化剂
4. Integrated Resonant Dual-Microcantilevers Combined Sensor with Accurate Identification and Highly-Sensitive Detection to H2S Gas [C] . Lei Tang, Pengcheng Xu, Ming Li, International Conference on Solid-State Sensors, Actuators and Microsystems amp;amp;amp;amp;amp;amp;amp;amp;amp;amp;amp;amp;amp;amp;amp; Eurosensors . 2019

机译：集成的共振双微型微型器组合传感器，具有精确的识别和高度敏感的检测，对H 2 S气体
5. A Highly-Sensitive Global-shutter Cmos Image Sensor with On-chip Memory for Hundreds of Kilo-frames Per Second Scientific Experiments [D] . Moutafis, Konstantinos . 2019

机译：一个高度敏感的全球快门CMOS图像传感器，片上存储器，每秒数百千帧框架科学实验
6. The combined rapid detection and species-level identification of yeasts in simulated blood culture using a colorimetric sensor array [O] . Nabin K. Shrestha, Sung H. Lim, Deborah A. Wilson, 2012

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7. The combined rapid detection and species-level identification of yeasts in simulated blood culture using a colorimetric sensor array. [O] . Nabin K Shrestha, Sung H Lim, Deborah A Wilson, 2017

机译：使用比色传感器阵列在模拟血培养中结合快速检测和物种水平鉴定酵母。
8. Passive, Highly-Sensitive, Room-Temperature Magnetic Field Sensors and Arrays for Detection and Imaging of Hidden Threats in Urban Environments. [R] . Viehland, D. 2012

机译：用于检测和成像城市环境中隐藏威胁的被动，高灵敏度室温磁场传感器和阵列。

Integrated Resonant Dual-Microcantilevers Combined Sensor with Accurate Identification and Highly-Sensitive Detection to H

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