Fabrication of ordered trench structures with high aspect ratios by anisotropic anode etching of Al(100)

摘要

Ordered trench structures with high aspect ratios were formed by the anisotropic anode etching of (100)-oriented Al foils. A thin polymer mask with a periodic line and space pattern enabled the selective anode etching of Al in an electrolyte containing Cl~- ions. The shape and depth of the obtained trenches were strongly dependent on the temperature of the electrolyte used for anode etching. On the basis of this property, trenches with controlled geometrical structures could be obtained through this process.