DESIGN AND OPTIMIZATION OF MICRO SCANNER DRIVEN BY FOLDED PIEZOELECTRIC UNIMORPH ACTUATORS USING PZT FILMS

摘要

A microscanner actuated by folded piezoelectric unimorph actuators using PZT thin films is designed and optimized to obtain large scanning angle with low driving voltage and stable mechanical performance. The micro scanner consists of two piezoelectric folded cantilever microactuators and a planar micromirror between the microactuators. Each actuator consists of several multilayer cantilevers in series. The device structure and fabrication process are presented and the mechanical performance of the mi croscan-ner is simulated and optimized. The deflecting angle of the piezoelectrically actuated microscanner with respect to applied voltage and structural parameters are investigated. With large tilting angle, small chip size and low power dissipation, the piezoelectrically actuated microscanner is expected to be promising for wide scanning applications.