PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS

摘要

A piezoelectric 2D-optical micro scanner was fabricated with PZT thick-film actuators prepared using Arc Discharge Reactive Ion-Plating method. Two orthogonal pairs of unimorph actuators were used to compose a double-gimbal structure. The inner and outer actuators were controlled independently. A large elliptical mirror (1 mm x 2 mm) was scanned two-dimensionally. The scanner showed large optical scan angles of 23 degrees (4.3 kHz for X-scan) by 52 degrees (90.3 Hz for Y-scan) at low driving voltages of typical 10-20 V AC with a 5 V dc offset. The frequency ratio provided 47 scanning lines. Using the 2D scanner, we demonstrated laser image-projection of some characteristics.