Self-separated Pb(Zr0.52Ti0.48)O3 (PZT) films were processed by a hydrothermal deposition and a rapid thermal separation method, followed by a sol–gel filling and sintering process. The films possess excellent piezoelectric and electromechanical properties close to those of bulk material. The maximum remnant polarization is over 30 μC/cm2 and the electromechanical coupling factor (kt) reaches as high as 0.52. The unique microstructure characteristics of the PZT films, such as their highly dense structure, columnar grains, well-connected grain boundaries, and well-dispersed nanopores, could all contribute to the enhanced piezoelectric and electromechanical properties.
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