School of Materials Science and Chemistry,Harbin Engineering University,Harbin 150001;
Key Laboratory of Integrated Circuit,Heilongjiang University,Harbin 150080;
School of Materials Science and Engineering,Beijing Institute of Technology,Beijing 100081;
School of Materials Science and Chemistry,Harbin Engineering University,Harbin 150001;
School of Materials Science and Engineering,Beijing Institute of Technology,Beijing 100081;
School of Information Engineering,Central University for Nationalities,Beijing 100081;
School of Materials Science and Engineering,Beijing Institute of Technology,Beijing 100081;
School of Materials Science and Engineering,Beijing Institute of Technology,Beijing 100081;
Key Laboratory of Integrated Circuit,Heilongjiang University,Harbin 150080;