A microelectrostatic repulsive-torque rotation actuator with two-width fingers

摘要

A microelectrostatic repulsive-torque rotation actuator with two-width fingers is presented. The actuator consists of finger-shaped electrodes and is made of two thin film layers, i.e. one movable layer and one fixed layer. There are two types of finger electrodes, namely constant-width and two-width fingers. The two-width finger has a narrow lower segment and a wide top segment. The constant-width finger has only the narrow lower segment. Each rotation finger has its corresponding aligned and unaligned fixed fingers. The electrostatic repulsive torque is generated and acts on the rotation fingers to rotate them up and away from the substrate. As a result, rotation is not limited by the gap between the movable and fixed layers and the 'pull-in' instability is avoided. Thus a large out-of-plane rotation and high operational stability can be achieved. The actuator is suitable for two-layer surface micromachining. The model of the actuator is developed. Prototypes are fabricated and tested. The experimental tests show that the actuator achieved a mechanical rotation of 7.65 degrees at a driving voltage of 150 V. The settling time for a mechanical rotation of 5 degrees is 5.7 ms.