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IEEE/SEMI advanced semiconductor manufacturing conference and workshop

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1.Sequential screening in semiconductor manufacturing: exploiting lot-to-lot variability and spatial dependence

机译：半导体制造中的顺序筛选：利用批量变异性和空间依赖性
- 作者：Wein L.M.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
2.Managing safety for results

机译：管理安全性的安全性
- 作者：Crunk J.B.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
3.Yield and productivity management

机译：产量和生产力管理
- 作者：Effron M.S.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
4.IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC '92 Proceedings (Cat. No.92CH3182-3)

机译：IEEE /半高级半导体制造会议和研讨会。 ASMC '92课程（猫。No.92CH3182-3）
- 作者：Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
5.The challenge for American manufacturing

机译：美国制造业的挑战
- 作者：Lavigne N.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
6.Technology outreach

机译：技术外展
- 作者：Beeson D.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
7.MOS device technology trend and future direction

机译：MOS设备技术趋势和未来方向
- 作者：Nakato T.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
8.An automated system for loading Atmoscan process tubes using intrabay material handling technologies

机译：使用IntraBay材料处理技术加载Atmoscan Process Tubes的自动化系统
- 作者：Walsh J.;Tyra K.P.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
9.A market-driven methodology for improving servicability through an integrated customer/supplier partnership (CSP)

机译：通过集成的客户/供应商合作（CSP）来提高可维护方法的市场驱动方法
- 作者：Rothberg S.;Hilmar J.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
10.Progress toward host tool integration of in situ particle monitors

机译：原位粒子监测器寄主工具集成的进展
- 作者：Borden P.G.;Burghard R.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
11.True employee empowerment vs. one more job we have to do

机译：真正的员工赋予权力与更多工作我们要做的工作
- 作者：Allred D.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
12.Wafer fab production controls for the 90s

机译：晶圆厂生产控制器90年代
- 作者：Clark C.D.;Bunch T.E.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
13.Managing technology transfer: a matrix approach

机译：管理技术转移：矩阵方法
- 作者：Wentz M.L.;Blanc A.J.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
14.Optimized metalization processing for improved manufacturability

机译：优化的金属化加工，提高可制造性
- 作者：Chowdhury V.;Harper G.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
15.Optimization of LPCVD silicon nitride process in a vertical thermal reactor: use of design of experiments

机译：垂直热反应器中LPCVD氮化硅加工的优化：实验设计的使用
- 作者：Shenasa M.;Moinpour M.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
16.An analytical approach to improving equipment productivity

机译：提高设备生产力的分析方法
- 作者：DiSessa P.;Stone S.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
17.Resource sharing in capacity analysis

机译：能力分析中的资源共享
- 作者：Rohan D.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
18.Profile control in isotropic plasma etching

机译：在各向同性等离子体蚀刻中的轮廓控制
- 作者：Zhu H.;Lindquist R.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
19.Manufacturing integrated market driven quality

机译：制造综合市场驱动质量
- 作者：Johnson G.V.;McClure S.R.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
20.New ultra large field submicron i-line stepper for advanced mix-and-match applications

机译：用于高级混合和匹配应用的新型超大型现场亚微米I-Line步进
- 作者：Wise L.;Mahany R.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
21.Energy contamination control in multiple charged ion implantations

机译：多带电离子植入中的能量污染控制
- 作者：van der Meulen P.F.H.M.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
22.Key technologies for future IC manufacturing: a view from Europe

机译：未来IC制造的关键技术：欧洲的视图
- 作者：Van Rossum M.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
23.Examining process induced contamination: plasma etching and chemical vapor deposition reactors coupled to an in situ surface analytical capability

机译：检查过程诱导污染：等离子体蚀刻和化学气相沉积反应器耦合到原位表面分析能力
- 作者：Bohling D.A.;George M.A.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
24.Process flow system for VLSI research and development

机译：VLSI研究与开发的过程流动系统
- 作者：Funakoshi K.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
25.Application of feed-forward and feedback control to a photolithography sequence

机译：前馈和反馈控制在光刻序列中的应用
- 作者：Leang S.;Spanos C.J.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
26.Rapid thermal processing for reproducible formation of the self-aligned silicides of cobalt and platinum

机译：用于可再生形成钴和铂的自对准硅化物的快速热处理
- 作者：Murarka S.P.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
27.Chemical-mechanical planarization

机译：化学机械平面化
- 作者：Roberts B.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
28.Plasma-etching induced damage in thin oxide

机译：等离子体蚀刻诱导薄氧化物损伤
- 作者：Shin H.;Hu C.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
29.CHARM2: towards an industry-standard wafer surface-charge monitor

机译：Charm2：朝向行业标准晶片表面充电监测器
- 作者：Lukaszek W.;Quek E.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
30.Key issues for the unplanned transfer of VLSI technology

机译：VLSI技术意外转移的关键问题
- 作者：Chen B.;Starkey G.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
31.Case-based hypermedia access of 'lessons learned' to accomplish technology transfer

机译：基于案例的超媒体访问“经验教训”以完成技术转让
- 作者：Broverman C.A.;Rogers K.J.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
32.Simultaneous in-situ measurement of film thickness and temperature by using multiple wavelength pyrometric interferometry (MWPI)

机译：使用多波长高温干涉测定法（MWPI）同时出于原位测量膜厚度和温度
- 作者：Boebel F.G.;Moller H.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
33.ALT: a dynamic, flexible approach to configurations, maturity, and access control for manufacturing systems

机译：ALT：用于制造系统的配置，成熟度和访问控制的动态，灵活的方法
- 作者：Akselrod V.;Losleben P.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
34.Product defect reduction through the use of business process management

机译：通过使用业务流程管理减少产品缺陷
- 作者：Bombardier J.K.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
35.Advanced CIM environment for manufacturing data analysis

机译：用于制造数据分析的高级CIM环境
- 作者：Miller W.H. Jr.;Poole M.W.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
36.Characterization of the wafer dicing process using Taguchi methodology

机译：使用Taguchi方法表征晶片切割过程
- 作者：Shah H.;Ram S.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
37.Rapid development, in a manufacturing environment, of a 1 mu m triple-level metal CMOS process through the use of cross-functional teams

机译：通过使用跨官能团队，在制造环境中快速发展，在制造环境中，通过使用跨官能团队来处理1亩
- 作者：Comard M.;Cuellar J.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
38.A continuous operations workschedule implementation

机译：连续运营工程实施
- 作者：Dunki-Jacobs R.P.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
39.A large-scale SPC implementation using the IBM multimedia SPC program

机译：使用IBM多媒体SPC程序进行大规模的SPC实现
- 作者：Harrison M.;Shapiro R.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
40.Why even successful teams sometimes fail-self-directed team catalysts

机译：为什么甚至成功的团队有时会失败自我导向的团队催化剂
- 作者：Tomlinson K.P.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
41.Application of real-time expert systems in semiconductor manufacturing

机译：实时专家系统在半导体制造中的应用
- 作者：Subbiah V.;Bodenstab J.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
42.Dynamic Kanban semiconductor inventory management system

机译：动态Kanban半导体库存管理系统
- 作者：Kraft C.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
43.Productivity improvement in semiconductor fabrication environment using automode 2E+simulation software

机译：使用Automode 2E +仿真软件的半导体制造环境的生产率改进
- 作者：Joseph V.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
44.A novel design for the construction and startup of an eight inch pilot line

机译：一种八英寸试点线的建设和启动的新颖设计
- 作者：Tseng B.H.P.;Cheng C.-H.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
45.Test equipment correlation: a statistical approach

机译：测试设备相关性：统计方法
- 作者：Kumar H.;Erjavic S.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
46.The practical application of total quality management

机译：完全质量管理的实际应用
- 作者：Anderson R.D. Jr.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
47.Self-learning fuzzy modeling of semiconductor processing equipment

机译：半导体加工设备的自学习模糊建模
- 作者：Chen R.L.;Spanos C.J.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
48.Using a statistical experimental design to optimize a phosphorus deposition process in a high volume production facility

机译：使用统计实验设计，优化大量生产设施中的磷沉积过程
- 作者：Fearon P.;Caldwell B.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
49.In-line automated inspection for semiconductor assembly

机译：半导体组件在线自动检查
- 作者：Wang S.-P.T.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年
50.The economic benefits of new stepper technology for manufacturing with 0.35 mu m IC design rules

机译：用0.35亩IC设计规则制造新步进技术的经济效益
- 作者：Bigelow M.G.;van Hout F.J.;Institute of Electric and Electronic Engineer
- 会议名称：《IEEE/SEMI advanced semiconductor manufacturing conference and workshop》 | 1992年