Using a statistical experimental design to optimize a phosphorus deposition process in a high volume production facility

摘要

In this study a statistically designed experiment was first used to improve the uniformity of an existing reactor. Three factors were examined in combination in an 8*8 resolution V experiment. Uniformity was noticeably improved on a batch size that was increased from 50 to the minimum goal of 75 wafers. The result of this first experiment did not achieve the process goal, since the uniformities remained unremarkable at 10.9 Omega /sq. across the load, so a different reactor design was tested. Two factors were tested in combination in an experiment using this reactor. Uniformity was improved to 2.2 Omega /sq. across a load size of 125 wafers, which was 67% above the goal.