Advanced CIM environment for manufacturing data analysis

摘要

An environment for performing complex analyses of semiconductor manufacturing processes and IC products is described. This innovative analysis toolset has increased the productivity of product engineering, process engineering and design organizations by providing a method for complex manufacturing data reduction without the need for exhaustive training. The interactive, forms-based interface utility has also provided significant reductions in the time required to isolate parameters and identify relationships that significantly influence manufacturing yields. The foundation of the system is the internally developed, Unix-based Manufacturing and Engineering Data Base (MEDB). MEDB is a fully automated system for collecting and loading in-line manufacturing parameters and sample probe, wafer probe, and package test data from a variety of equipment platforms.