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机译:垂直硅纳米线阵列模式的微悬臂谐振器,用于增强对香烟烟雾气溶胶的检测
Inst. of Semicond. Technol., Tech. Univ. Braunschweig, Braunschweig, Germany;
aerosols; cantilevers; elemental semiconductors; gas sensors; micromechanical resonators; nanolithography; nanowires; silicon; smoke detectors; soft lithography; sputter etching; Si; aerosol sampling efficiency; cigarette smoke aerosol detection; cylindrical wire structures; inductively coupled plasma cryogenic reactive ion etching; nanoimprint lithography; nanoimprint stamp size; photolithography; size 300 nm; surface modification; vertical silicon nanowire array-patterned microcantilever resonators;
机译:利用垂直硅纳米线共振器的飞克气溶胶纳米颗粒质量传感
机译:自上而下的硅微悬臂与自下而上的硅纳米线耦合,可提高质量分辨率
机译:自上而下的硅微悬臂梁与自下而上的硅纳米线相连,可提高质量分辨率(第26卷,第145502页,2015年)
机译:垂直纳米线谐振器的制造,用于气溶胶暴露评估
机译:使用硅光子微环谐振器的颗粒增强生物分子检测。
机译:使用垂直硅纳米线电极阵列灵敏和选择性检测HIV-1 RRE RNA
机译:增强无应力硅纳米线生长微电势传感器的质量敏感性