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Conference on smart sensors, actuators, and MEMS VI

召开年：2013
召开地：Grenoble(FR)
出版时间：-

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1.A nano-power energy harvesting IC for arrays of piezoelectric transducers

机译：用于压电换能器阵列的纳米功率收集IC
- 作者：M. Dini;M. Filippi;A. Romani;V. Bottarel;G. Ricotti;M. Tartagni
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
2.A closed-loop system for frequency tracking of piezoresistive cantilever sensors

机译：压阻悬臂传感器频率跟踪闭环系统
- 作者：Hutomo Suryo Wasisto;Qing Zhang;Stephan Merzsch;Andreas Waag;Erwin Peiner
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
3.Development of energy harvester system for avionics

机译：航空电子能源收割机系统的开发
- 作者：Z. Hadas;V. Vetiska;Z. Ancik;C. Ondrusek;V. Singule
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Energy harvesting;
- vibration;
- vibration energy harvester;
- simulation modeling;
- optimization;
- model-based design;
- power management;
- battery;
4.Simulation and design optimization of transparent heaters for spectroscopic micro cells

机译：光谱微电池透明加热器的模拟与设计优化
- 作者：Henning Voellm;Jonathan Herrmann;Reinhard Maier;Dara Feili;Volker Haeublein;Heiner Ryssel;Helmut Seidel
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
5.Parametrization of Ambient Energy Harvesters for Complementary Balanced Electronic Applications

机译：互补平衡电子应用环境能量收割机的参数化
- 作者：Yannick Verbelen;An Braeken;Abdellah Touhafi
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
6.Electrically conductive Pt-Rh/ZrO_2 and Pt-Rh/HfO_2 nanocomposite electrodes for high temperature harsh environment sensors

机译：用于高温苛刻环境传感器的导电PT-RH / ZRO_2和PT-RH / HFO_2纳米复合电极
- 作者：Scott C. Moulzolf;David J. Frankel;Mauricio Pereira da Cunha;Robert J. Lad
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- nanocomposite films;
- stable electrodes;
- Pt-Rh;
- ZrO_2;
- HfO_2;
- langasite;
- surface acoustic wave (SAW) devices;
7.Design and Material Aspects for Thermoelectric Energy Harvesting Devices in Aircrafts

机译：飞机热电能收割装置的设计与材料方面
- 作者：A.Elefsiniotis;N. Kokorakis;Th. Becker;U. Schmid
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
8.Flexible Hot-film Anemometer Arrays for Flow Measurements on Curved Structures

机译：柔性热薄膜风速计阵列，用于弯曲结构上的流量测量
- 作者：T. Beutel;M. Schwerter;M. Leester-Schadel;A. Dietzel;S. Buettgenbach
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- aeroMEMS;
- flexible MEMS;
- hot-wire anemometer;
- polyimide;
- thermal sensor;
- thin-film sensors;
9.Magnetic tunnel junction sensors with pTesla sensitivity for biomedical imaging

机译：具有PTESLA的磁隧道结传感器对生物医学成像的PTESLA敏感性
- 作者：S. Cardoso;L.Gameiro;D. C. Leitao;F.Cardoso;R.Ferreira;E. Paz;P.P. Freitas
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Magnetic Tunnel Junction;
- Flux Guides;
- Noise;
10.Hybrid energy storage system for wireless sensor node powered by aircraft specific thermoelectric energy harvesting

机译：用于无线传感器节点的混合能储能系统，由飞机特定的热电能量收集提供动力
- 作者：K.Thangaraj;A.Elefsiniots;S.Aslam;Th.Becker;U.Schmid;J.Lees;C.A. Featherston;R.Pullin
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- energy harvesting;
- wireless sensors;
- wireless sensor networks;
- power management;
- energy storage;
- structural health monitoring;
- supercapacitors;
11.Flat inductors for human motion energy harvesting

机译：用于人体运动能量收获的平电感器
- 作者：Juris Blums;Galina Terlecka;Ilgvars Gornevs;Ausma Vilumsone
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- energy harvesting;
- flat inductors;
- electromagnetic harvester;
- human motion;
- wearable generator;
- embroidered inductors;
- smart clothing;
12.A high thermal resistance MEMS-based Pirani vacuum sensor chip

机译：基于高热电阻的Pirani真空传感器芯片
- 作者：Florian Dams;Rupert Schreiner
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- vacuum gauge;
- thermal conductivity;
- Pirani;
- MEMS;
13.MEMS pressure sensor fabricated by advanced bulk micromachining techniques

机译：MEMS压力传感器由先进的散装微机械技术制造
- 作者：Gabriel Vanko;Peter Hudek;Johann Zehetner;Jaroslav Dzuba;Pavlina Choleva;Martin Vallo;Ivan Ryger;Tibor Lalinsky
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- residual stress;
- AlGaN/GaN membrane;
- CHEMT;
- laser ablation;
- high temperature metallization;
14.Investigations on the High Temperature Compatibility of Various Adhesion Layers for Platinum

机译：对铂的各种粘附层高温相容性的研究
- 作者：A. Ababneh;A.N. Al-Omari;M. Marschibois;D. Feili;H. Seidel
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Platinum;
- adhesion layer;
- high temperature;
- diffusion;
- grain boundaries;
- hillock formation;
15.Hydrogel plug for independent sample and buffer handling in continuous microchip capillary electrophoresis

机译：用于独立样品和缓冲器处理的水凝胶插头在连续微芯片毛细管电泳中处理
- 作者：Dietmar Puchberger-Enengl;Mireille Bipoun;Martin Smolka;Christian Krutzler;Franz Keplinger;Michael J. Vellekoop
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
16.Fabrication of an array-like freeform molding tool for UV-replication using a step and repeat process

机译：使用步骤和重复过程制造用于UV复制的阵列样式模塑工具
- 作者：J. Dunkel;F. Wippermann;A. Brueckner;A. Reimann;A. Braeuer
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- artificial compound eye camera;
- wafer level optics;
- micro optics;
- imaging;
17.A Miniaturised Linear Shaker System for MEMS Sensor Characterisation

机译：用于MEMS传感器表征的小型线性振动筛系统
- 作者：Joerg Encke;Wilfried Hortschitz;Andreas Kainz;Harald Steiner;Franz Keplinger;Thilo Sauter
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Shaker;
- Testing;
- Piezo;
18.Quality Factor Enhancement for Resonant MEMS Applying an Analogue Feedback Circuit Driven by a Lock-in Amplifier

机译：用于锁定放大器驱动的模拟反馈电路的谐振MEM的质量因子增强
- 作者：Martin Kucera;Franz Hofbauer;Tomas Manzaneque;Victor Ruiz;Jose Luis Sanchez-Rojas;Achim Bittner;Ulrich Schmid
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- MEMS;
- piezoelectric A1N;
- Quality factor enhancement;
- Q-control;
- analogue feedback;
- self-sensing;
19.MEMS sensors for mm-range displacement measurements with sub nm-resolution

机译：具有子NM分辨率的MM范围位移测量的MEMS传感器
- 作者：Vladimir T. Stavrov;Vencislav M. Todorov;Assen A. Shulev;Chavdar M. Hardalov
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- mm-range displacement sensor;
- MEMS;
- sidewall piezoresistors;
- nm-resolution;
20.All-silicon microforce sensor for bio applications

机译：BIO应用的全硅微型传感器
- 作者：Vladimir T. Stavrov;Assen A. Shulev;Chavdar M. Hardalov;Vencislav M. Todorov;Ilia R. Roussev
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- MEMS;
- force sensor;
- sidewall piezoresistors;
- cell injection;
21.Photovoltaic Energy Harvesting for Smart Sensor Systems

机译：智能传感器系统的光伏能量收集
- 作者：Martin Kasemann;Karola Ruehle;Karim M. Gad;Stefan W. Glunz
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- energy harvesting;
- indoor photovoltaics;
- low-lighting conditions;
- photovoltaic cells;
- solar cells;
22.An Autonomous Structural Health Monitoring Solution

机译：自主结构健康监测解决方案
- 作者：Carol A. Featherston;Karen M. Holford;Rhys Pullin;Jonathan Lees;Mark Eaton;Matthew Pearson
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Structural health monitoring;
- energy harvesting;
- wireless transmission;
23.MEMS pressure sensor with maximum performances by using novel back-side direct-exposure concept featuring through glass vias

机译：MEMS压力传感器具有通过使用玻璃通孔的新型背面直曝光概念的最大性能
- 作者：B. Mukhopadhvav;M. Fritz;P. Mackowiak;T. C. Vu;O. Ehrmann;K.-D. Lang;H.-D.Ngo
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
24.Efficient nanoparticle filtering using bioinspired functional surfaces

机译：使用Bioinspired功能表面的高效纳米粒子过滤
- 作者：Sebastian Busch;Manuel Ketterer;Xenia Vinzenz;Christian Hoffmann;Juergen Woellenstein
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- pollen surface;
- particle filter;
- fine dust;
25.Detection of bad indoor environment with a miniaturized gas sensor system

机译：用小型气体传感器系统检测不良室内环境
- 作者：J. Huber;R. Binninger;K. Schmitt;J. Woellenstein
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- indoor environment;
- volatile organic compounds;
- preconcentrator;
- gas sensor;
26.A RESONANCE-BASED SOLAR ELEMENT: A NUMERICAL MODEL AND MICRO/NANO TECHNOLOGY APPLICATION

机译：基于共振的太阳能元件：数值模型和微/纳米技术应用
- 作者：P. Fiala;P. Drexler;D. Nespor
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Energy harvesting;
- resonant generator;
- THz tuned structure;
- the finite element analysis;
- experimental structure;
27.CONTOUR AND FLEXURE-ACTUATED IN-PLANE MODES OF ALN-BASED PIEZOELECTRIC VIBRATING MEMS

机译：基于ALN的压电振动MEMS的轮廓和弯曲致动的面内模式
- 作者：V. Ruiz-Diez;T. Manzaneque;J. Hernando-Garcia;A. Ababneh;M. Kucera;A.N. Al-Omari;A. Bittner;U. Schmid;H. Seidel;J.L. Sanchez-Rojas
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- MEMS;
- piezoelectric;
- in-plane motion;
- AlN;
28.Simulation and Fabrication of Integrated Polystyrene Microlens in Microfluidic System

机译：微流体系统中集成聚苯乙烯微透镜的模拟与制备
- 作者：Yiqiang Fan;Huawei Li;David Conchouso;Ian G. Foulds
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- microlens;
- microfluidics;
- polystyrene;
29.Investigation on the Dielectric Behavior of Aluminum Nitride Thin Films at Different Temperatures Applying a Time-zero Approach

机译：氮化铝薄膜在不同温度下施加时间零接近的介质行为的研究
- 作者：Michael Schneider;Achim Bittner;Ulrich Schmid
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- aluminum nitride;
- dielectric breakdown;
- thin films;
- sputter deposition;
- MIS;
- MIM;
- depletion layer;
30.Optical position feedback of quasi-static 2D MOEMS mirrors

机译：准静态2D MoEms镜子的光学位置反馈
- 作者：A. Tortschanoff;M. Baumgart;D. Holzmann;M. Lenzhofer;T. Sandner;A. Kenda
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- MOEMS;
- quasi-static scanner;
- closed-loop control;
- MEMS driver;
- electronics;
- MEMS;
31.Wearable and flexible thermoelectric generator with enhanced package

机译：具有增强型封装的可穿戴和柔性热电发电机
- 作者：L. Francioso;C. De Pascali;A. Taurino;P. Siciliano;A. De Risi
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Thermoelectric generator;
- high performance package;
- flexible wearable electronics;
32.Novel applications of piezoresistive thin film systems based on hydrogenated carbon

机译：基于氢化碳压阻薄膜系统的新型应用
- 作者：Saskia Biehl;Christian Rumposch;Christian Recknagel
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- thin film sensor system;
- piezoresistive;
- spindle;
- washer;
33.ZnO Nanogenerators - Energy Generation through Scavenging Vibration, Advantages of Using a Diode

机译：ZnO纳米液 - 通过清除振动的能量产生，使用二极管的优点
- 作者：Joe Briscoe;Nimra Jalali;Peter Wooliams;Mark Stewart;Markys Cain;Paul M. Weaver;Steve Dunn
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
34.Analysis of thermal vias in molded interconnect devices

机译：模压互连器件中热通孔的分析
- 作者：Joerg Reitterer;Franz Fidler;Ferdinand Saint Julien-Wallsee;Maximilian Barth;Wolfgang Eberhardt;Ulrich Kessler;Heinz Kueck;Ulrich Schmid
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Molded interconnect device;
- LPKF-LDS? process;
- thermal via;
- thermal resistance;
- conductive adhesive;
- MEMS;
- MOEMS;
35.Simulation, design and fabrication of a planar micro thermoelectric generator

机译：平面微电发电机的仿真，设计和制造
- 作者：S. Pelegrini;A. Adami;C. Collini;P. Conci;L.Lorenzelli;A. A. Pasa
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- thermoelectric generators;
- thin film electrodeposition;
- energy harvesting;
36.Analysis of local deformation effects in resistive strain sensing of a submicron-thickness AFM cantilever

机译：亚微米厚度AFM悬臂电阻应变感应的局部变形效应分析
- 作者：Jonathan D. Adams;Christian H. Schwalb;Marcel Winhold;Maja Dukic;Michael Huth;Georg E. Fantner
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
37.Simulation of Thick Film PZT Actuators with Interdigitated Electrodes

机译：厚膜PZT致动器用互联电极仿真
- 作者：Mohanad Mohammed Zaki;Sandy Zaehringer;Norbert Schwesinger
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Interdigitated electrodes;
- thick film;
- piezoelectric non-linearity;
- micro actuator;
- FEM-simulation;
38.Flip-chip packaging of piezoresistive barometric pressure sensors

机译：压阻气压传感器的倒装芯片封装
- 作者：T. Waber;W. Pahl;M. Schmidt;G. Feiertag;S. Stufler;R. Dudek;A. Leidl
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Flip-chip packaging;
- piezoresistive barometric pressure sensors;
- temperature hysteresis;
39.Control of Cavitation Density through Gas and Acoustic Uniformity in a Proximity Megasonic Pre-bond Cleaning System

机译：通过气体和声学均匀性控制空化密度在近距离粘键清洁系统中的气体均匀性
- 作者：D. Dussault;E. Liebscher;F. Fournel;V. Dragoi
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Fusion Wafer Bonding;
- Wafer Clean;
- Megasonic;
- 3D Integration;
- Cavitation;
40.Shortening of the process chain by tactile inline measurement

机译：通过触觉内联测量缩短过程链
- 作者：Dr. Lutz Doering;Nicole Thronicke;Christian Loebner;Dr. Thomas Frank;Dr. Steffen Reich;Stefan Vollmeke;Arndt Steinke
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Sensor;
- microelectromechanical device;
- piezo-resistive;
- bridge;
- cantilever;
41.Pressure Dependence of the Quality Factor of Piezoelectrically driven AIN/Si-Microcantilevers

机译：压电驱动AIN / SI-MICROCTILEVERS质量因子的压力依赖性
- 作者：A. Ababneh;A.N. Al-Omari;H.C. Qiu;T. Manzaneque;J. Hernando;J. L. Sanchez-Rojas;A. Bittner;U. Schmid;H. Seidel
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Resonantly driven micro cantilevers;
- piezoelectric;
- aluminiumnitride;
- quality factor;
- pressure dependence;
42.Design and Fabrication of a 5 MHz Ultrasonic Phased Array Probe with curved transducer

机译：具有弯曲换能器的5 MHz超声波相控阵探头的设计和制造
- 作者：Julia Fischer;Thomas Herzog;Susan Walter;Henning Heuer
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Ultrasonic;
- phased array;
- 1-3 composite;
- concave probe;
43.Fabrication of double-sided micro structured mechanical sensors based on SU-8 resist using a new micro molding process

机译：基于SU-8抗蚀剂的双面微结构机械传感器使用新的微模制工艺制造
- 作者：A. Oerke;S. Buettgenbach;A. Dietzel
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- SU-8;
- micro-fabrication;
- molding process;
- MEMS;
44.Controlled fabrication of advanced functional structures on the nanoscale by means of electron beam-induced processing

机译：通过电子束诱导的处理控制纳米级上的先进功能结构的制造
- 作者：Sebastian W. Schmidt;Johann Foucher;Christian Penzkofer;Bernd Irmer
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- Electron beam induced processing;
- precision;
- resolution;
- diamond-like carbon;
- CD-AFM;
- cold field emitter;
- field enhancement;
45.Design, Fabrication and Characterization of a Micromachined Piezoelectric Energy Harvester Excited by Ambient Vibrations

机译：通过环境振动激发的微机械压电能量收割机的设计，制造和表征
- 作者：Ali B. Alamin Dow;Achim Bittner;Ulrich Schmid;Nazir P. Kherani
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- piezoelectricity;
- energy harvesting;
- vibration;
- aluminum nitride;
46.Measurement of the 1/f noise of lateral actuated MEMS with sidewall piezoresistors

机译：用侧壁压阻器测量横向致动MEMS的1 / F噪声
- 作者：Vladimir Stavrov;Franz Kohl;Thilo Sauter;Philip Philipov
- 会议名称：《Conference on smart sensors, actuators, and MEMS VI》 | 2013年
- sidewall piezoresistors;
- 1/f noise;
- piezoresistive MEMS;