Quantitative secondary ion mass spectrometric analysis of secondary ion polarity in GaN films implanted with oxygen

摘要

Quantitative analyses of N and O ions in GaN thin films implanted with oxygen ions (O-16(+)) were conducted by secondary ion mass spectrometry (SIMS). Positive (CsM+) and negative secondary ions extracted by Cs+ primary ion bombardment were analyzed for oxygen quantitative analysis. The oxygen depth profiles were obtained using two types of primary ion beams: a Gaussian-type beam and a broad spot beam. The oxygen peak concentrations in GaN samples were from 3.2 x 10(19) to 7.0 x 10(21) atoms/cm(3). The depth profiles show equivalent depth resolutions in the two analyses. The intensity of negative oxygen ions was approximately two orders of magnitude higher than that of positive ions. In contrast, the O/N intensity ratio measured using CsM+ molecular ions was close to the calculated atomic density ratio, indicating that the SIMS depth profiling using CsM+ ions is much more effective for the measurements of O and N ions in heavy O-implanted GaN than that using negative ions. (C) 2016 The Japan Society of Applied Physics