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Liquid metal ion source, secondary ion mass spectrometer, secondary ion mass spectrometric analysis procedure and their applications

机译:液态金属离子源,二次离子质谱仪,二次离子质谱分析程序及其应用

摘要

Liquid metal ion source comprises bismuth in an alloy containing an other metal with an atomic weight of = 90 u, a solubility in bismuth of = 1%, with few or no isotopes and/or any narrow isotopic arrangement and during the ion beam production none or only small amount of mixed clusters with bismuth forms. Independent claims are included for: (1) a secondary particle mass spectrometer for the analysis of secondary particles such as secondary ions and/or post-ionized neutral secondary particles with a liquid metal ion source for the generation of a primary ion beam for the irradiation of a sample and generation of secondary particles, which exhibit the liquid metal ion source as well as primary ion beam emitted from the liquid metal ion source with a filter device and one of several types of bismuth ion, whose mass amounts to a multiple of the monoatomic, singly or multiply charged bismuth ions, is to be filtered out in the form of a mass-pure primary ion beam, when one of several types of ion of the other metal are filterable as mass-pure filtered primary ion beam; and (2) a secondary particle mass spectrometric analysis method for the analysis of a sample, where the surface of the sample is irradiated with a primary ion beam, and a primary ion beam is generated, where: the beam contains monoatomic or polyatomic ions of a first metal and monoatomic ions of an other metal; the ions of the first metal exhibit an atomic weight of = 190 u and the ions of the other metal exhibit an atomic weight of = 90 u, alternately from the primary ion beam on the one hand, one of several types of ion of the first metal filtered as mass-pure primary ion beam and on the other hand one of several types of ion of the other metal filtered as mass-pure primary ion beam, are filtered out, and the secondary particle spectrum containing primary ion beam filtered with the ions of the first metal and the secondary particle spectrum containing primary ion beam filtered with the ions of the other metal are determined.
机译:液态金属离子源包含合金中的铋,该合金包含原子量= 90 u的铋,在铋中的溶解度> = 1%,很少或没有同位素和/或任何狭窄的同位素排列以及在离子束产生期间没有或只有少量的具有铋形式的混合团簇。包括以下独立权利要求:(1)次级粒子质谱仪,用于使用液体金属离子源分析次级粒子(例如次级离子和/或后电离的中性次级粒子),以产生用于辐射的初级离子束样品的产生和次级粒子的产生,这些粒子具有液态金属离子源以及带有过滤装置和几种铋离子中的一种的从液态金属离子源发出的初级离子束,其质量等于质量分数的倍数。当另一种金属的几种离子中的一种可作为纯净过滤初级离子束过滤时,单原子,单或多价铋离子应以纯净初级离子束的形式滤出; (2)用于分析样品的二次粒子质谱分析方法,其中用一次离子束照射样品表面,并产生一次离子束,其中:所述束包含单原子或多原子离子。第一金属和另一种金属的单原子离子;第一种金属离子的原子量大于等于190 u,另一种金属离子的原子量大于等于90 u,一方面与一次离子束交替出现,但多种离子中的一种过滤掉作为纯质一次离子束过滤的第一种金属,另一方面过滤掉作为纯质一次离子束过滤的另一种金属的几种类型的离子中的一种,然后用确定第一金属的离子和包含被另一种金属的离子过滤的一次离子束的二次粒子光谱。

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