A 2-Bit Recessed Channel Nonvolatile Memory Device With a Lifted Charge-Trapping Node

摘要

A novel 2-bit recessed channel nonvolatile memory device is proposed in this paper. Physically separated two charge-trapping nodes are lifted up to achieve large sensing margin in highly scaled memory devices. A successful 2-bit/cell operation with effective suppression of second bit effect is achieved by adopting the lifted charge-trapping node scheme. In addition, the effect of the source/drain junction depth on memory operation characteristics is investigated.