The authors describe current research and development on a robotic visual servoing system for assembly of LIGA (lithography galvonoforming abforming) parts. The workcell consists of an AMTI robot, precision stage, long working distance microscope, and LIGA fabricated tweezers for picking up the parts. Fourier optics methods are used to generate synthetic microscope images from CAD drawings. These synthetic images are used off-line to test image processing routines under varying magnifications and depths of field. They also provide reference image features which are used to visually servo the part to the desired position. Currently, we can visually servo a 100 micron outside diameter LIGA gear to a desired x,y reference position as determined from a synthetic image of the gear.
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