Robotic micromanipulation for microassembly: modelling by sequencial function chart and achievement by multiple scale visual servoings

摘要

The paper investigates robotic assembly by focusing on the manipulation of microparts. This task is formalized through the notion of basic tasks which are organized in a logical sequence represented by a function chart and interpreted as the model of the behavior of the experimental setup. The latter includes a robotic system, a gripping system, an imaging system, and a clean environment. The imaging system is a photon videomicroscope able to work at multiple scales. It is modelled by a linear projective model where the relation between the scale factor and the magnification or zoom is explicitly established. So, the usual visual control law is modified in order to take into account this relation. The manipulation of some silicon microparts (400 μm × 400 μm × 100 μm) by means of a distributed robotic system (xyθ system, φz system), a two-finger gripping system and a controllable zoom and focus videomicroscope shows the relevance of the concepts. The 30% of failure rate comes mainly from the physical phenomena (electrostatic and capillary forces) instead of the accuracy of control or the occultations of microparts.