Short-Channel Metal-Gate TFTs With Modified Schottky-Barrier Source/Drain

摘要

A thin active layer, a fully silicided source/drain (S/D), a modified Schottky-barrier, a high dielectric constant (high-K) gate dielectric, and a metal gate are integrated to realize high-performance thin-film transistors (TFTs). Devices with 0.1-μm gate length were fabricated successfully. Low threshold voltage, low subthreshold swing, high transconductance, low S/D resistance, high on/off current ratio, and negligible threshold voltage rolloff are demonstrated. It is thus suggested for the first time that the short-channel modified Schottky-barrier TFT is a solution to carrier out three-dimension integrated circuits and system-on-panel.