High-Tactile Sensitivity of Piezoresistive Sensors With a Micro-Crack Structure Induced by Thin Film Tension

Longlong Chen; Jiayu Feng; Tongkuai Li; Xifeng Li; Jianhua Zhang

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High-Tactile Sensitivity of Piezoresistive Sensors With a Micro-Crack Structure Induced by Thin Film Tension

机译：薄膜张力引起的具有微裂纹结构的压阻传感器的高触感

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摘要

In this letter, a simple high-performance piezoresistive tactile sensor based on polymer film micro-cracks is proposed. The cracks are automatically formed by the self-tension of the metal layer sputtered on the polydimethylsiloxane film and the sensing m

机译：在这封信中，提出了一种基于聚合物薄膜微裂纹的简单高性能压阻式触觉传感器。裂纹是由溅射在聚二甲基硅氧烷膜上的金属层的自张力和感应力自动形成的

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来源
《IEEE Electron Device Letters》 |2019年第9期|1519-1521|共3页
作者
Longlong Chen; Jiayu Feng; Tongkuai Li; Xifeng Li; Jianhua Zhang;
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作者单位

Key Laboratory of Advanced Display and System Application Ministry of Education Shanghai University Shanghai China;

Key Laboratory of;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类
关键词
Piezoresistance; Sensitivity; Tactile sensors; Metals; Pressure sensors; Electrodes;

机译：压阻;灵敏度;触觉传感器;金属;压力传感器电极;

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2. Current-induced recrystallization of polycrystalline silicon nano thin films deposited at different temperatures and its influences on piezoresistive sensitivity and temperature coefficients [J] . Shi C.-Z., Liu X.-W., Chuai R.-Y. Sensors and Actuators, A. Physical . 2010,第2期

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High-Tactile Sensitivity of Piezoresistive Sensors With a Micro-Crack Structure Induced by Thin Film Tension

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