PIEZORESISTIVITY TYPE SENSOR STRUCTURE MINIMIZING BEATING-SHAFT SENSITIVITY AND METHOD FOR MANUFACTURING THE SENSOR

摘要

PURPOSE: A piezoresistivity type sensor structure minimizing beating-shaft sensitivity and a method for manufacturing the same are provided to remove beating-shaft sensitivity without lowering sensitivity by effectively arranging piezoresistors and remove various noises. CONSTITUTION: A piezoresistivity type sensor structure minimizing beating-shaft sensitivity includes two pairs of piezoresistors(40) arranged on two beams in the same direction in cross type four beams(20) formed on a semiconductor substrate(10) for constructing a wheatstone bridge circuit forming the sensor, so that resistance change of the piezoresistivity by acceleration from a shaft except the needed shaft are removed from the wheatstone bridge circuit.