Solid-state dewetting of thin Au films studied with real-time, in situ spectroscopic ellipsometry

摘要

Graphical abstract Display Omitted Highlights • Created a high vacuum, portable chamber to perform real time, in situ spectroscopic ellipsometry. • Used the chamber to investigate the temperature-driven, solid-state dewetting of thin Au films. • Emergence of a localized surface plasmon resonance as a result of the Au dewetting. • Temperature threshold in the Au dewetting. Abstract We report the design and testing of a small, high vacuum chamber that allows real-time, in situ spectroscopic ellipsometry (SE) measurements; the chamber was designed to be easily inserted within the arms of a commercial ellipsometer. As a test application, we investigated the temperature-induced solid-state dewetting of thin (20 to 8nm) Au layers on Si wafers. In situ SE measurements acquired in real time during the heating of the samples reveal features that can be related to the birth of a localized surface plasmon resonance (LSPR), and demonstrate the presence of a temperature threshold for the solid-state dewetting.