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In situ real-time spectroscopic ellipsometry study of HfO2 thin films grown by using the pulsed-source MOCVD

机译：利用脉冲源mOCVD生长HfO2薄膜的原位实时光谱椭偏仪研究

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Zheng Y.; Mizuta Hiroshi; Tsuchiya Yoshishige; Endo M.; Sato D.; Oda S.;
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年度 2005
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1. In situ real-time spectroscopic ellipsometry study of HfO_2 thin films grown by using the pulsed-source metal-organic chemical-vapor deposition [J] . Yangdong Zheng, Hiroshi Mizuta, Yoshishige Tsuchiya, Journal of Applied Physics . 2005,第2期

机译：脉冲源金属有机化学气相沉积法生长HfO_2薄膜的原位实时光谱椭偏研究
2. Solid-state dewetting of thin Au films studied with real-time, in situ spectroscopic ellipsometry [J] . M. Magnozzi, F. Bisio, M. Canepa Applied Surface Science . 2017,第PTaB期

机译：利用实时原位光谱椭圆偏振法研究Au薄膜的固态去湿
3. Erratum to 'Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring' [Thin Solid Films 455-456 (2004) 828-836] [J] . Hsu-Ting Huang, Fred L. Terry Jr. Thin Solid Films . 2004,第1a2期

机译：针对“用于临界尺寸测量和就地实时过程监控的光栅的光谱椭圆偏光法和反射法（散射法）”勘误[Thin Solid Films 455-456（2004）828-836]
4. In situ real-time studies of oxygen incorporation in complex oxide thin films using spectroscopic ellipsometry and scattering and recoil spectrometry [C] . A. H. Mueller, Y. Gao, E. A. Irene, Materials Research Society Symposium . 2000

机译：使用光谱椭圆形测定法和散射和再射频光谱法在氧化氧化物薄膜中氧气掺入的原位实时研究
5. Real-time spectroscopic ellipsometry investigations of the nucleation and growth of crystalline particles and thin films [D] . Nguyen, Hien Van. 1993

机译：实时椭圆偏振光谱研究晶体颗粒和薄膜的成核和生长
6. Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry [O] . Ufuk Kilic, Alyssa Mock, Derek Sekora, -1

机译：通过原位光谱椭圆偏振法在金属氧化物薄膜的等离子体增强原子层沉积过程中发现前体-表面相互作用
7. Pulsed-source MOCVD HfO2 ultrathin film growth optimized by in situ ellipsometry monitoring [O] . Tsuchiya Yoshishige, Endoh M, Oda S 2003

机译：通过原位椭偏仪监测优化脉冲源mOCVD HfO2超薄膜生长
8. In situ real-time studies of oxygen incorporation in complex oxide thin films using spectroscopic ellipsometry and ion scattering and recoil spectrometry [R] . Mueller, A. , Gao, Y. , Irene, E. , 2000

机译：利用光谱椭偏仪和离子散射及反射光谱法对复合氧化物薄膜中氧的掺入进行原位实时研究

In situ real-time spectroscopic ellipsometry study of HfO2 thin films grown by using the pulsed-source MOCVD

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