SPECTROSCOPIC IMAGE ELLIPSOMETRY APPARATUS FOR LARGE AREA THIN FILM MEASUREMENT IN REAL TIME

摘要

The present invention relates to an ellipsometry apparatus for a large area in real time and, more specifically, relates to a spectroscopic image ellipsometry apparatus for large area thin film measurement in real time, which electronically controls a direction of polarized light irradiated to a specimen to rapidly change a direction of the polarized light. Moreover, a thin film of the specimen can be three-dimensionally measured with a surface measurement method.;COPYRIGHT KIPO 2017