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A pure single-walled carbon nanotube thin film based three-terminal microelectromechanical switch

机译：基于纯单壁碳纳米管薄膜的三端微机电开关

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摘要

The electrical and physical properties of pure single-walled carbon nanotube thin films deposited through a layer-by-layer-self-assembly process are discussed. The film thickness was proportional to the number of dipping cycles. The film resistivity was estimated as 2.19 × 10~(-3) ft cm after thermal treatment processes were performed. The estimated specific contact resistance to gold electrodes was 6.33 × 10~(-9)Ω m~2 from contact chain measurements. The fabricated three-terminal microelectromechanical switch using these films functioned as a beam for multiple switching cycles with a 4.5 V pull-in voltage. This switch is believed to be a promising device for low power digital logic applications.
机译：讨论了通过逐层自组装工艺沉积的纯单壁碳纳米管薄膜的电学和物理性质。膜厚度与浸渍循环数成正比。经过热处理后，薄膜电阻率估计为2.19×10〜（-3）ft cm。根据接触链测量，金电极的比电阻估计为6.33×10〜（-9）Ωm〜2。使用这些薄膜制成的三端微机电开关可在4.5 V的吸合电压下充当多个开关周期的光束。该开关被认为是用于低功耗数字逻辑应用的有前途的设备。

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  • 来源
    《Applied Physics Letters》 |2011年第7期|p.073502.1-073502.3|共3页
  • 作者

    Min-Woo Jang; Chia-Ling Chen; Walter E. Partio III; Shruti R. Patil; Dongjin Lee; Zhijang Ye; David Lilja; T. Andrew Taton; Tianhong Cui; Stephen A. Campbell;

  • 作者单位

    Department of Electrical and Computer Engineering, University of Minnesota, 200 Union St. SE,Minneapolis, Minnesota 55455, USA;

    Department of Electrical and Computer Engineering, University of Minnesota, 200 Union St. SE,Minneapolis, Minnesota 55455, USA;

    Department of Chemistry, University of Minnesota, 207 Pleasant St. SE, Minneapolis, Minnesota 55455,USA;

    Department of Electrical and Computer Engineering, University of Minnesota, 200 Union St. SE,Minneapolis, Minnesota 55455, USA;

    Department of Mechanical Engineering, University of Minnesota, 111 Church St. SE, Minneapolis,Minnesota 55455, USA;

    Department of Mechanical Engineering, University of Minnesota, 111 Church St. SE, Minneapolis,Minnesota 55455, USA;

    Department of Electrical and Computer Engineering, University of Minnesota, 200 Union St. SE,Minneapolis, Minnesota 55455, USA;

    Department of Chemistry, University of Minnesota, 207 Pleasant St. SE, Minneapolis, Minnesota 55455,USA;

    Department of Mechanical Engineering, University of Minnesota, 111 Church St. SE, Minneapolis,Minnesota 55455, USA;

    Department of Electrical and Computer Engineering, University of Minnesota, 200 Union St. SE,Minneapolis, Minnesota 55455, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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