Flexible Crossbar-Structured Resistive Memory Arrays on Plastic Substrates via Inorganic-Based Laser Lift-Off

摘要

Flexible electronics have been extensively investigated in hopes of realizing system-on-plastic (SoP) applications as the next-generation technology in various areas, ranging from consumer electronics to bio-integrated medical devices. Flexible memory in particular is regarded as an integral component for SoP applications because of its crucial role in data processing, storage, and communications with external devices. A number of research groups have explored a variety of organic-based flexible memories including flash memory, ferroelectric memory, and resistive memory, directly fabricated at relatively low temperature on flexible substrates using spin-coating, roll-to-roll, and other processes. Although these organic-based flexible memories have been well-established with the capability of achieving flexible electronics over large areas in a cost-effective manner, there are still big challenges in developing high-density flexible memory with high performance, including how to resolve insufficient performance arising from inherent material properties and the non-compatibility with complementary metal-oxide-semiconductor (CMOS) processes.