首页> 美国卫生研究院文献>Journal of Vacuum Science and Technology. B Nanotechnology Microelectronics >Rapid serial prototyping of magnet-tipped attonewton-sensitivity cantilevers by focused ion beam manipulation
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Rapid serial prototyping of magnet-tipped attonewton-sensitivity cantilevers by focused ion beam manipulation

机译:通过聚焦离子束操纵快速完成磁化阿牛顿灵敏度悬臂的连续原型设计

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摘要

The authors report a method for rapidly prototyping attonewton-sensitivity cantilevers with custom-fabricated tips and illustrate the method by preparing tips consisting of a magnetic nanorod overhanging the leading edge of the cantilevers. Micron-long nickel nanorods with widths of 120–220 nm were fabricated on silicon chips by electron beam lithography, deposition, and lift-off. Each silicon chip, with its integral nanomagnet, was attached serially to a custom-fabricated attonewton-sensitivity cantilever using focused ion beam manipulation. The magnetic nanorod tips were prepared with and without an alumina capping layer, and the minimum detectable force and tip magnetic moment of the resulting cantilevers was characterized by cantilever magnetometry. The results indicate that this serial but high-yield approach is an effective way to rapidly prepare and characterize magnetic tips for the proposed single-electron-spin and single-proton magnetic resonance imaging experiments. The approach also represents a versatile route for affixing essentially any vacuum-compatible sample to the leading edge of an attonewton-sensitivity cantilever.
机译:作者报告了一种利用定制尖端快速制作对牛顿敏感性悬臂的原型的方法,并通过制备由悬于悬臂前端的磁性纳米棒组成的尖端来说明该方法。通过电子束光刻,沉积和剥离在硅芯片上制造了宽度为120–220 nm的微米长的镍纳米棒。每个硅芯片及其集成的纳米磁铁,都通过聚焦离子束操作串行连接到定制的attonewton灵敏度悬臂梁上。制备具有和不具有氧化铝覆盖层的磁性纳米棒尖端,并且通过悬臂磁力测定法表征所得悬臂的最小可检测力和尖端磁矩。结果表明,这种串行但高产率的方法是一种快速准备和表征所提出的单电子自旋和单质子磁共振成像实验的磁头的有效方法。该方法还代表了一条通用的途径,可以将基本上任何与真空兼容的样品固定在对牛顿敏感性悬臂梁的前沿。

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