Journal of Vacuum Science and Technology. B, Nanotechnology Microelectronics

【机译】：[真空科学与技术。 B，纳米技术微电子

• ISSN：-
• 出版周期：Bimonthly
• 语言：English

• 起始发布年份：2010
• 出版者：New York, NY : AVS through the American Institute of Physics, c2010-
• 出版地：United States

NLM刊名缩写：J Vac Sci Technol B Nanotechnol Microelectron

数据库引入：PubMed: Selected citations only

MeSH词表主题词：

备注：Some articles in v. 28 published electronically in 2009. Also issued online.展开▼