基于碳纳米管场发射的压力传感器仿真与设计

摘要

碳纳米管是场发射阴极的极佳材料.基于碳纳米管和金属铜的复合电镀技术,采用有限元软件对压力传感器的碳纳米管布设进行了有限元仿真,使用模拟退火算法对阳极变形膜的尺寸进行了优化,并设计了实现压力传感器的工艺过程.碳纳米管的管径在不影响电镀质量的情况下可尽量小,选取的长度不影响直立,间距在500 nm时可获得最大电流.阳极膜的压力窗最优厚度为0.209 84 mm,窗口长度4.9178 mm,此时阳极膜的变形和应力均处于最大值.通过可行性工艺的执行,可制造出体积小、质量轻、灵敏度高的压力传感器.%Carbon nanotubes are excellent materials of field emission cathode. Based on the carbon nanotubes and copper composite electroplating technology. The layout of the carbon nanotubes of pressure sensors is simulated using FEM ,the size of the anode membrane is optimized using simulation annealing algorithm and pressure sensor process are designed and achieved. In the case of no affecting the electroplating quality, diameter of the carbon nanotubes can be as small as possible, and without affecting the vertical for the select length spacing in the maximum current obtained with 500 nm. For the pressure window of the anodic film, the optimal thickness is 0.20984 mm and optimal size 4.9178 mm, at this time in the maximum deformation and stress. By the feasibility implementation process, the pressure sensor with small size,light weight,high sensitivity can be produced.