桌面级精密平面抛光机转台结构设计

摘要

研究设计了一种基于圆柱滚子平面推力轴承的新型桌面级精密平面抛光机转台.阐述了转台的总体结构设计,对偏载情况下抛光盘支撑结构与传统抛光盘支撑结构的抛光盘变形进行了有限元分析.制作了转台样机并对其空载与偏载情况下的抛光盘跳动进行了测量与分析.仿真及实验结果表明,所设计新型转台结构与传统抛光盘支撑结构相比具有更好的偏载稳定性;当偏载逐渐增大时,抛光盘动态端跳测量值基本保持稳定.所设计抛光机转台,可在提高抛光效率同时保证抛光面型精度的稳定性.%A new kind of turntable of tabletop precision plane polisher based on plane thrust bearing supporting is designed.Describe the overall structure design of the turntable,and make the finite element analysis on the deformation of the polishing pad of the proposed support structure and the traditional one under the bias load.The prototype is made and the end jump of polishing pad was measured and analyzed in the case of no load and bias load.The results of simulation and experiment show that the new design of the turntable structure has better bias load stability than the traditional,with the load increasing,the dynamic measurement of the end face run-out is stable.Based on the design of tumtable for the polisher,the polishing efficiency can be improved and simultaneously the stability of the polishing surface accuracy can be ensured.