The influences of nitrogen flow percentage on microstructure and hardness of ZrN nano-coatings fabricated by DC magnetron sputtering were investigated. The thickness, phase structure, morphology of cross-section and hardness of ZrN nano-coatings were characteri ed with profilometer, X-ray diffraction, scanning electron microscope and nanoindentation. The results show that the nitrogen flow percentage significantly affects the thickness and phase structure of ZrN nano-coatings. With increasing nitrogen flow percentage, the coating thickness decreases and the phase structure evolves from the orientation (111) to (200), the cross-section morphology changes from columnar structure to non-columnar structure as well. For the ZrN nano-coating, the dislocation sliding is not the cause for plastic deformation, and the hardness increases with the increasing grain size and preferred orientation.%利用磁控溅射方法,通过改变氮气流量制备出ZrN纳米涂层,研究了氮气流量对ZrN纳米涂层结构及硬度的影响,并采用表面轮廓仪、X射线衍射仪、扫描电镜及纳米压痕表征了ZrN纳米涂层的厚度、相结构、形貌及硬度.实验结果表明,随着氮气流量增加,涂层厚度减小,涂层择优取向由(111)变为(200),对应的截面形貌由柱状结构变为非柱状结构;传统的位错滑移机制不适用于ZrN纳米涂层的塑性变形,其硬度随择优取向和晶粒尺寸的增大而增加.
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