PROCEDURE FOR PRODUCTION OF NANO STRUCTURED GRADIENT OXIDE COATING OF CATALYTIC MATERIAL BY METHOD OF MAGNETRON SPUTTERING

摘要

FIELD: metallurgy.;SUBSTANCE: prepared metal substrate is preliminary heated in vacuum to temperature 400-450°C and sputtered with metal composition of system (Ti-Ru), (Ti-Ru-Ir), (Zr-Ru) in medium of plasma generating gas argon and reaction gas oxygen by magnetron method. Pressure of argon is maintained constant during whole process of sputtering. Also, partial pressure of oxygen is changed according to linear law from 0 to 8·10^-2 Pa during 10 min; at stabilised pressure of oxygen the said metal composition is sputtered to specified thickness of coating.;EFFECT: increased strength of cohesion of coating with substrate and mechanical strength of coating proper.;1 tbl, 2 ex