College of Physics and Electronic Information Science;
Tianjin Normal University;
Tianjin 300074;
China;
Institute of Plasma Physics;
Chinese Academy of Science;
Hefei 230031;
China College of Physics and Electronic Information Science;
Tianjin Normal University;
Tianjin 300074;
China College of Physics and Electronic Information Science;
Tianjin Normal University;
Tianjin 300074;
China College of Physics and Electronic Information Science;
Tianjin Normal University;
Tianjin 300074;
China;
magnetron; sputtering; multilayered; gradient; coating; CrN/ZrN; nanoindentation;