双面光刻机运动控制系统设计分析

摘要

According to the movement of the double-sided Maskaligner machine control requirements, This paper presents a design scheme of modular. It analyzes majorly PID adjustment methods of alignmentw orkbench so thathigh dynamic response and high precision motion controlare realized.%针对双面光刻机运动控制需求，提出模块化的设计方案，重点分析了对准工作台PID 调节方法，实现了高动态响应、高精度运动控制。