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Fixed-Time Control for a Class of Unknown Nonlinear Affine Systems and Its applications to a Lithography Machine

机译:一类未知非线性仿射系统及其在光刻机的应用的固定时间控制

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The fixed-time control problems of a class of unknown nonlinear affine systems subject to external disturbances, unknown input dead zone and output constraints are considered in this paper. The fixed-time state feedback control strategy with adaptive neural networks (NNs) is designed. In the control design, the log-type barrier Lyapunov function (BLF) is chosen to handle the system output constraint. Then, neural networks(NNs) are applied to compensate for the adverse impact of unknown input dead zone and deal with system uncertainties. The novel virtual controllers and novel online updating laws of neural network weights are proposed to fulfill the fixed-time stability of closed-loop systems. The boundednesses of all the signals in closed-loop system are demonstrated via Lyapunov stability theory. Eventually, the experiment performed on the lithography machine is served to demonstrate good performance.
机译:本文考虑了一类受外部干扰,未知的输入死区和输出约束的一类未知非线性仿射系统的固定时间控制问题。设计了具有自适应神经网络(NNS)的固定时间状态反馈控制策略。在控制设计中,选择Log-Type Barrier Lyapunov功能(BLF)以处理系统输出约束。然后,应用神经网络(NNS)以补偿未知输入死区的不利影响并处理系统不确定性。提出了神经网络权重的新颖虚拟控制器和新型在线更新定律,以满足闭环系统的固定时间稳定性。通过Lyapunov稳定性理论证明了闭环系统中所有信号的界限。最终,在光刻机上进行的实验用于展示良好的性能。

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