Zn1-xFexO (x=0.01, 0.05, 0.10) compounds were fabricated by the sol-gel method. The X-ray diffraction patterns show that the wurzite structure does not change for all doped-ZnO samples. Furthermore, we could not find any Fe cluster or phase separation in the X-ray diffraction patterns. The photoluminescence of Fe-doped ZnO with different solution concentration, annealing temperature and Fe dopant concentration were investigated. Thermal annealing improved the optical quality of the doped-ZnO. The low Fe content doped-ZnO with 0.1 mol/L-solution concentration exhibits improved photoluminescence.%采用溶胶-凝胶法制备了Zn1-xFexO (x=0.01, 0.05, 0.10)纳米薄膜.X射线衍射谱显示所有样品均具有六角纤锌矿结构.而且在X射线衍射谱中没有发现其他相存在.研究了在不同的溶液浓度、退火温度和Fe浓度下制备的掺杂ZnO薄膜的光致发光谱.结果表明,热退火提高了样品的光学质量.溶液浓度为0.1 mol/L,且Fe含量较低的条件下,样品的光学质量有所提高.
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