College of Nanoscale Science and Engineering, the University at Albany - SUNY, Albany, New York 12203, USA;
College of Nanoscale Science and Engineering, the University at Albany - SUNY, Albany, New York 12203, USA;
College of Nanoscale Science and Engineering, the University at Albany - SUNY, Albany, New York 12203, USA;
College of Nanoscale Science and Engineering, the University at Albany - SUNY, Albany, New York 12203, USA;
College of Nanoscale Science and Engineering, the University at Albany - SUNY, Albany, New York 12203, USA;
College of Nanoscale Science and Engineering, the University at Albany - SUNY, Albany, New York 12203, USA;
机译:用于铜直接电镀的钴薄膜的等离子增强原子层沉积(PEALD)
机译:氮化铜膜的原子层沉积及其在电沉积铜籽晶层中的应用
机译:ZnO的室温等离子体增强原子层沉积:薄膜生长依赖于PEALD反应器配置
机译:PEBLD的超低温度沉积铜种子层
机译:低工艺温度下库珀种子层的等离子体增强原子层沉积。
机译:在通过原子层沉积形成的种子层上生长的化学调谐分层ZnO纳米结构的光电流检测
机译:ZnO的室温等离子体增强原子层沉积:薄膜生长依赖于PEALD反应器配置