Abstract: In micro-electromechanical system (MEMS) such as sensors and actuators, thin film has been widely used as microstructural materials. MEMS materials have differences with bulk in terms of mechanical reliability. So, the electrostatically actuated test structure is presented to measure the micromechanical reliability of micromaterials as thin films forming the microactuators. The designed test structures is fabricated by using the surface micromachining processes and driven by the electrostatic force. The sharp notch in the test structure is introduced by controlling the etching condition. The displacement, deflection and curvature of free standing beam in the electrostatic test structure under the electrostatic force is analyzed on the basis of the beam bending theory. From these results, we can predict the driving characteristics and the micromechanical reliability of microactuator materials under the operating condition.!9
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